scholarly journals Integration of micro-optical elements with top-end of fibers via focused ion beam direct fabrication

2005 ◽  
Author(s):  
Yongqi Fu ◽  
Ngoi K. A. Bryan
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Optical Elements ◽  
Direct Fabrication

scholarly journals Fabrication of Si Micropore and Graphene Nanohole Structures by Focused Ion Beam

Sensors ◽  
2020 ◽  
Vol 20 (6) ◽  
pp. 1572
Author(s):  
Nik Noor Nabilah Md Ibrahim ◽  
Abdul Manaf Hashim
Keyword(s):  
Single Molecule ◽  
Focused Ion Beam ◽  
Deoxyribonucleic Acid ◽  
Ion Beam ◽  
Si Substrate ◽  
Device Structure ◽  
Fluidic Channel ◽  
Direct Fabrication ◽  
Transfer Method ◽  
Sensing Membrane

A biosensor formed by a combination of silicon (Si) micropore and graphene nanohole technology is expected to act as a promising device structure to interrogate single molecule biopolymers, such as deoxyribonucleic acid (DNA). This paper reports a novel technique of using a focused ion beam (FIB) as a tool for direct fabrication of both conical-shaped micropore in Si3N4/Si and a nanohole in graphene to act as a fluidic channel and sensing membrane, respectively. The thinning of thick Si substrate down to 50 µm has been performed prior to a multi-step milling of the conical-shaped micropore with final pore size of 3 µm. A transfer of graphene onto the fabricated conical-shaped micropore with little or no defect was successfully achieved using a newly developed all-dry transfer method. A circular shape graphene nanohole with diameter of about 30 nm was successfully obtained at beam exposure time of 0.1 s. This study opens a breakthrough in fabricating an integrated graphene nanohole and conical-shaped Si micropore structure for biosensor applications.

Direct fabrication of nanopores in a metal foil using focused ion beam with in situ measurements of the penetrating ion beam current

2009 ◽  
Vol 80 (12) ◽  
pp. 125102 ◽  
Author(s):  
Kotaro Nagoshi ◽  
Junki Honda ◽  
Hiroyuki Sakaue ◽  
Takayuki Takahagi ◽  
Hitoshi Suzuki
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Beam Current ◽  
In Situ Measurements ◽  
Metal Foil ◽  
Direct Fabrication

Direct fabrication of nano-gap electrodes by focused ion beam etching

2006 ◽  
Vol 499 (1-2) ◽  
pp. 279-284 ◽  
Author(s):  
Takashi Nagase ◽  
Kenji Gamo ◽  
Tohru Kubota ◽  
Shinro Mashiko
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Beam Etching ◽  
Direct Fabrication

scholarly journals Mass-producible micro-optical elements by injection compression molding and focused ion beam structured titanium molding tools

2020 ◽  
Vol 45 (5) ◽  
pp. 1184 ◽  
Author(s):  
Simon Ristok ◽  
Marcel Roeder ◽  
Simon Thiele ◽  
Mario Hentschel ◽  
Thomas Guenther ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Compression Molding ◽  
Optical Elements ◽  
Injection Compression Molding

Direct fabrication of a W-C SNS Josephson junction using focused-ion-beam chemical vapour deposition

2014 ◽  
Vol 24 (5) ◽  
pp. 055015 ◽  
Author(s):  
Jun Dai ◽  
Reo Kometani ◽  
Koji Onomitsu ◽  
Yoshiharu Krockenberger ◽  
Hiroshi Yamaguchi ◽  
...  
Keyword(s):  
Josephson Junction ◽  
Chemical Vapour Deposition ◽  
Focused Ion Beam ◽  
Vapour Deposition ◽  
Ion Beam ◽  
Chemical Vapour ◽  
Direct Fabrication
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