Focused Ion Beam Direct Fabrication of Subwavelength Nanostructures on Silicon for Multicolor Generation

2018 ◽  
Vol 3 (8) ◽  
pp. 1800100 ◽  
Author(s):  
Vivek Garg ◽  
Rakesh G. Mote ◽  
Jing Fu
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Direct Fabrication

scholarly journals Fabrication of Si Micropore and Graphene Nanohole Structures by Focused Ion Beam

Sensors ◽  
2020 ◽  
Vol 20 (6) ◽  
pp. 1572
Author(s):  
Nik Noor Nabilah Md Ibrahim ◽  
Abdul Manaf Hashim
Keyword(s):  
Single Molecule ◽  
Focused Ion Beam ◽  
Deoxyribonucleic Acid ◽  
Ion Beam ◽  
Si Substrate ◽  
Device Structure ◽  
Fluidic Channel ◽  
Direct Fabrication ◽  
Transfer Method ◽  
Sensing Membrane

A biosensor formed by a combination of silicon (Si) micropore and graphene nanohole technology is expected to act as a promising device structure to interrogate single molecule biopolymers, such as deoxyribonucleic acid (DNA). This paper reports a novel technique of using a focused ion beam (FIB) as a tool for direct fabrication of both conical-shaped micropore in Si3N4/Si and a nanohole in graphene to act as a fluidic channel and sensing membrane, respectively. The thinning of thick Si substrate down to 50 µm has been performed prior to a multi-step milling of the conical-shaped micropore with final pore size of 3 µm. A transfer of graphene onto the fabricated conical-shaped micropore with little or no defect was successfully achieved using a newly developed all-dry transfer method. A circular shape graphene nanohole with diameter of about 30 nm was successfully obtained at beam exposure time of 0.1 s. This study opens a breakthrough in fabricating an integrated graphene nanohole and conical-shaped Si micropore structure for biosensor applications.

Direct fabrication of nanopores in a metal foil using focused ion beam with in situ measurements of the penetrating ion beam current

2009 ◽  
Vol 80 (12) ◽  
pp. 125102 ◽  
Author(s):  
Kotaro Nagoshi ◽  
Junki Honda ◽  
Hiroyuki Sakaue ◽  
Takayuki Takahagi ◽  
Hitoshi Suzuki
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Beam Current ◽  
In Situ Measurements ◽  
Metal Foil ◽  
Direct Fabrication

Direct fabrication of nano-gap electrodes by focused ion beam etching

2006 ◽  
Vol 499 (1-2) ◽  
pp. 279-284 ◽  
Author(s):  
Takashi Nagase ◽  
Kenji Gamo ◽  
Tohru Kubota ◽  
Shinro Mashiko
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Beam Etching ◽  
Direct Fabrication

Direct fabrication of a W-C SNS Josephson junction using focused-ion-beam chemical vapour deposition

2014 ◽  
Vol 24 (5) ◽  
pp. 055015 ◽  
Author(s):  
Jun Dai ◽  
Reo Kometani ◽  
Koji Onomitsu ◽  
Yoshiharu Krockenberger ◽  
Hiroshi Yamaguchi ◽  
...  
Keyword(s):  
Josephson Junction ◽  
Chemical Vapour Deposition ◽  
Focused Ion Beam ◽  
Vapour Deposition ◽  
Ion Beam ◽  
Chemical Vapour ◽  
Direct Fabrication

Nanocomposite Polyurethane Foams Via POSS Blends

2002 ◽  
Vol 733 ◽  
Author(s):  
Brock McCabe ◽  
Steven Nutt ◽  
Brent Viers ◽  
Tim Haddad
Keyword(s):  
High Temperature ◽  
Sample Preparation ◽  
Room Temperature ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Polyurethane Foams ◽  
Development Projects ◽  
Polymer Systems ◽  
Polyurethane Resin ◽  
Military Development

AbstractPolyhedral Oligomeric Silsequioxane molecules have been incorporated into a commercial polyurethane formulation to produce nanocomposite polyurethane foam. This tiny POSS silica molecule has been used successfully to enhance the performance of polymer systems using co-polymerization and blend strategies. In our investigation, we chose a high-temperature MDI Polyurethane resin foam currently used in military development projects. For the nanofiller, or “blend”, Cp7T7(OH)3 POSS was chosen. Structural characterization was accomplished by TEM and SEM to determine POSS dispersion and cell morphology, respectively. Thermal behavior was investigated by TGA. Two methods of TEM sample preparation were employed, Focused Ion Beam and Ultramicrotomy (room temperature).

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