Optical emission spectroscopy as a process monitor for triod ion plating with TiN

Mapping Intimacies ◽

10.1117/12.56653 ◽

1992 ◽

Cited By ~ 1

Author(s):

Mohamed Boumerzoug ◽

Peter Mascher ◽

Douglas R. Nagy

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Ion Plating ◽

Process Monitor

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Arc Ion Plating Process Monitoring by Optical Emission Spectroscopy Exemplified for Chromium Containing Coatings

Plasma Processes and Polymers ◽

10.1002/ppap.200930806 ◽

2009 ◽

Vol 6 (S1) ◽

pp. S357-S361 ◽

Cited By ~ 2

Author(s):

Kirsten Bobzin ◽

Nazlim Bagcivan ◽

Philipp Immich ◽

Sebastian Theiß

Keyword(s):

Process Monitoring ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Arc Ion Plating ◽

Ion Plating

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Process control with optical emission spectroscopy in triode ion plating

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.572882 ◽

1985 ◽

Vol 3 (6) ◽

pp. 2364-2367 ◽

Cited By ~ 14

Author(s):

K. Salmenoja ◽

A. S. Korhonen ◽

M. S. Sulonen

Keyword(s):

Process Control ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Ion Plating

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Analysis of a reactive sputter ion plating discharge for TiN deposition using optical emission spectroscopy

Thin Solid Films ◽

10.1016/0040-6090(85)90030-6 ◽

1985 ◽

Vol 124 (1) ◽

pp. 67-73 ◽

Cited By ~ 14

Author(s):

A. Ricard ◽

H. Michel ◽

P. Jacquot ◽

M. Gantois

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Ion Plating

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The use of optical emission spectroscopy for process control in triode ion plating with ZrN

Vacuum ◽

10.1016/0042-207x(86)90265-4 ◽

1986 ◽

Vol 36 (1-3) ◽

pp. 33-35 ◽

Cited By ~ 15

Author(s):

K Salmenoja ◽

AS Korhonen

Keyword(s):

Process Control ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Ion Plating

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Determination of the electron temperature profile above the evaporative source in an ion plating discharge by spatially resolved optical emission spectroscopy

Thin Solid Films ◽

10.1016/s0040-6090(03)00140-8 ◽

2003 ◽

Vol 434 (1-2) ◽

pp. 157-161 ◽

Cited By ~ 1

Author(s):

A.D. Wilson ◽

A. Davison ◽

A. Leyland ◽

A. Matthews ◽

K.S. Fancey

Keyword(s):

Electron Temperature ◽

Temperature Profile ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Ion Plating ◽

Spatially Resolved

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Determination of electron temperature in ion plating discharges by optical emission spectroscopy

Vacuum ◽

10.1016/0042-207x(91)90010-g ◽

1991 ◽

Vol 42 (15) ◽

pp. 1013-1015 ◽

Cited By ~ 10

Author(s):

K.S. Fancey ◽

A. Matthews

Keyword(s):

Electron Temperature ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Ion Plating

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Low temperature radio frequency sputter deposition of TiN thin films using optical emission spectroscopy as process monitor

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578863 ◽

1994 ◽

Vol 12 (1) ◽

pp. 83-89 ◽

Cited By ~ 25

Author(s):

Z. Pang ◽

M. Boumerzoug ◽

R. V. Kruzelecky ◽

P. Mascher ◽

J. G. Simmons ◽

...

Keyword(s):

Thin Films ◽

Low Temperature ◽

Radio Frequency ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Sputter Deposition ◽

Tin Thin Films ◽

Process Monitor

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Animal and vegetable fats and oils. Determination of trace elements by inductively coupled plasma optical emission spectroscopy (ICP-OES)

10.3403/30303050u ◽

2016 ◽

Keyword(s):

Trace Elements ◽

Inductively Coupled Plasma ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Fats And Oils ◽

Icp Oes ◽

Inductively Coupled ◽

Plasma Optical Emission Spectroscopy

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EXAMINING CONDUCTIVITY AND SUBSURFACE HEAVY METAL CONCENTRATIONS WITHIN WESTERN PENNSYLVANIA THROUGH THE USE OF INDUCTIVELY COUPLED PLASMA OPTICAL EMISSION SPECTROSCOPY

10.1130/abs/2018ne-310850 ◽

2018 ◽

Author(s):

Nicholas Santoro ◽

◽

Gregory J. Mount

Keyword(s):

Heavy Metal ◽

Inductively Coupled Plasma ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Metal Concentrations ◽

Heavy Metal Concentrations ◽

Inductively Coupled ◽

Western Pennsylvania ◽

Plasma Optical Emission Spectroscopy

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A proposed method for measurement of absolute air fluorescence yield based on high resolution optical emission spectroscopy

Astrophysics and Space Science ◽

10.1007/s10509-021-03951-5 ◽

2021 ◽

Vol 366 (5) ◽

Author(s):

V. Gika ◽

E. Fokitis ◽

S. Maltezos

Keyword(s):

High Resolution ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Fluorescence Yield ◽

Air Fluorescence

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