Infrared spectroscopic ellipsometry in semiconductor manufacturing

Mapping Intimacies ◽

10.1117/12.533935 ◽

2004 ◽

Cited By ~ 3

Author(s):

Pierre-Yves Guittet ◽

Ulrich Mantz ◽

Peter Weidner ◽

Jean-Louis Stehle ◽

Marc Bucchia ◽

...

Keyword(s):

Spectroscopic Ellipsometry ◽

Semiconductor Manufacturing ◽

Infrared Spectroscopic

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Infrared spectroscopic ellipsometry in semiconductor manufacturing

2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530) ◽

10.1109/asmc.2004.1309560 ◽

2004 ◽

Cited By ~ 1

Author(s):

P.-Y. Guittet ◽

U. Mantz ◽

P. Weidner

Keyword(s):

Spectroscopic Ellipsometry ◽

Semiconductor Manufacturing ◽

Infrared Spectroscopic

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Long-wavelength dielectric properties and infrared active optical phonon modes of molecular beam epitaxy ScxAl1−xN determined by infrared spectroscopic ellipsometry

Applied Physics Letters ◽

10.1063/5.0027364 ◽

2020 ◽

Vol 117 (23) ◽

pp. 232107

Author(s):

Alyssa L. Mock ◽

Alan G. Jacobs ◽

Eric N. Jin ◽

Matthew T. Hardy ◽

Marko J. Tadjer

Keyword(s):

Dielectric Properties ◽

Molecular Beam Epitaxy ◽

Spectroscopic Ellipsometry ◽

Optical Phonon ◽

Molecular Beam ◽

Phonon Modes ◽

Long Wavelength ◽

Infrared Spectroscopic

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Infrared Spectroscopic Ellipsometry analysis of Nano-structured thin films in polymers and semiconductors

Applied Surface Science ◽

10.1016/j.apsusc.2009.09.060 ◽

2009 ◽

Vol 256 (3) ◽

pp. S72-S76 ◽

Cited By ~ 6

Author(s):

Jean Louis Stehle ◽

Jean Philippe Piel

Keyword(s):

Thin Films ◽

Spectroscopic Ellipsometry ◽

Infrared Spectroscopic

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Introduction of infrared spectroscopic ellipsometry in a semiconductor production environment

Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI ◽

10.1109/asmc.2003.1194501 ◽

2003 ◽

Cited By ~ 1

Author(s):

P. Weidner ◽

U. Mantz ◽

P.Y. Guittet ◽

R. Wienhold ◽

M. Rimane ◽

...

Keyword(s):

Spectroscopic Ellipsometry ◽

Production Environment ◽

Infrared Spectroscopic ◽

Semiconductor Production

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Fourier-transform far-infrared spectroscopic ellipsometry for standoff material identification

Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment ◽

10.1016/j.nima.2010.02.079 ◽

2010 ◽

Vol 623 (2) ◽

pp. 791-793 ◽

Cited By ~ 1

Author(s):

Michele Ortolani ◽

Ulrich Schade

Keyword(s):

Fourier Transform ◽

Spectroscopic Ellipsometry ◽

Far Infrared ◽

Material Identification ◽

Infrared Spectroscopic

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Nondestructive measurement of thickness and carrier concentration of GaAs epitaxial layer using infrared spectroscopic ellipsometry

Journal of Applied Physics ◽

10.1063/1.366841 ◽

1998 ◽

Vol 83 (3) ◽

pp. 1384-1389 ◽

Cited By ~ 6

Author(s):

H. Nakano ◽

T. Sakamoto ◽

K. Taniguchi

Keyword(s):

Carrier Concentration ◽

Epitaxial Layer ◽

Spectroscopic Ellipsometry ◽

Nondestructive Measurement ◽

Infrared Spectroscopic ◽

Measurement Of Thickness ◽

Gaas Epitaxial Layer

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Application of a B-spline model dielectric function to infrared spectroscopic ellipsometry data analysis

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.5126110 ◽

2020 ◽

Vol 38 (1) ◽

pp. 014001

Author(s):

Joel Mohrmann ◽

Thomas E. Tiwald ◽

Jeffrey S. Hale ◽

James N. Hilfiker ◽

Andrew C. Martin

Keyword(s):

Data Analysis ◽

Dielectric Function ◽

Spectroscopic Ellipsometry ◽

B Spline ◽

Infrared Spectroscopic ◽

Ellipsometry Data ◽

Spectroscopic Ellipsometry Data

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Phonon Modes of InxGa1-xAs1-yNy Measured by Far Infrared Spectroscopic Ellipsometry

physica status solidi (b) ◽

10.1002/1521-3951(200111)228:1<259::aid-pssb259>3.0.co;2-7 ◽

2001 ◽

Vol 228 (1) ◽

pp. 259-262 ◽

Cited By ~ 1

Author(s):

G. Leibiger ◽

V. Gottschalch ◽

M. Schubert

Keyword(s):

Spectroscopic Ellipsometry ◽

Far Infrared ◽

Phonon Modes ◽

Infrared Spectroscopic

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Infrared spectroscopic ellipsometry of micrometer-sized SiO 2 line gratings

Applied Surface Science ◽

10.1016/j.apsusc.2017.04.118 ◽

2017 ◽

Vol 416 ◽

pp. 397-401

Author(s):

Cordula Walder ◽

Matthias Zellmeier ◽

Jörg Rappich ◽

Helge Ketelsen ◽

Karsten Hinrichs

Keyword(s):

Spectroscopic Ellipsometry ◽

Infrared Spectroscopic

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Optical functions, phonon properties, and composition of InGaAsN single layers derived from far- and near-infrared spectroscopic ellipsometry

Journal of Applied Physics ◽

10.1063/1.1416859 ◽

2001 ◽

Vol 90 (12) ◽

pp. 5951-5958 ◽

Cited By ~ 21

Author(s):

G. Leibiger ◽

V. Gottschalch ◽

M. Schubert

Keyword(s):

Spectroscopic Ellipsometry ◽

Near Infrared ◽

Optical Functions ◽

Infrared Spectroscopic ◽

Phonon Properties

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