Dynamic in-situ temperature profile monitoring of a deep-UV post-exposure bake process

2002 ◽  
Author(s):  
Barney M. Cohen ◽  
Wayne G. Renken ◽  
Paul Miller
Keyword(s):  
Temperature Profile ◽  
Profile Monitoring ◽  
Post Exposure ◽  
Post Exposure Bake ◽  
Deep Uv

Delay-time effects between exposure and post-exposure bake in acetal-based deep-UV photoresists

1993 ◽  
Author(s):  
Horst Roeschert ◽  
Charlotte Eckes ◽  
Hajime Endo ◽  
Yoshiaki Kinoshita ◽  
Takanori Kudo ◽  
...  
Keyword(s):  
Delay Time ◽  
Time Effects ◽  
Post Exposure ◽  
Post Exposure Bake ◽  
Deep Uv

A novel post exposure bake technique to improve CD uniformity over product wafers

2005 ◽  
Author(s):  
Tomoyuki Takeishi ◽  
K. Hayasaki ◽  
Tsuyoshi Shibata
Keyword(s):  
Post Exposure ◽  
Post Exposure Bake

Effect and procedures of post-exposure bake temperature optimization on the CD uniformity in a mass production environment

2007 ◽  
Author(s):  
Kirsten Ruck ◽  
Heiko Weichert ◽  
Steffen Hornig ◽  
Frank Finger ◽  
Göran Fleischer ◽  
...  
Keyword(s):  
Mass Production ◽  
Production Environment ◽  
Post Exposure ◽  
Temperature Optimization ◽  
Post Exposure Bake

Sub-millisecond post exposure bake of chemically amplified resists by CO 2 laser heat treatment

2010 ◽  
Author(s):  
Byungki Jung ◽  
Jing Sha ◽  
Florencia Paredes ◽  
Christopher K. Ober ◽  
Michael O. Thompson ◽  
...  
Keyword(s):  
Heat Treatment ◽  
Laser Heat Treatment ◽  
Post Exposure ◽  
Chemically Amplified ◽  
Laser Heat ◽  
Post Exposure Bake ◽  
Chemically Amplified Resists

Effect of Post Exposure Bake in Inorganic Electron Beam Resist and Utilizing for Nanoimprint Mold

2009 ◽  
Vol 9 (1) ◽  
pp. 562-566 ◽  
Author(s):  
Miyako Shizuno ◽  
Jun Taniguchi ◽  
Kenta Ogino ◽  
Kiyoshi Ishikawa
Keyword(s):  
Electron Beam ◽  
Post Exposure ◽  
Post Exposure Bake

Synoptic time-scale variability of sediment temperature profile and sound speed in shallow seas derived from in situ observations

2020 ◽  
Vol 244 ◽  
pp. 106932
Author(s):  
Guang-Bing Yang ◽  
Quanan Zheng ◽  
Xiaomin Hu ◽  
De-Jing Ma ◽  
Zhao Chen ◽  
...  
Keyword(s):  
Temperature Profile ◽  
Time Scale ◽  
Sound Speed ◽  
Sediment Temperature ◽  
In Situ Observations ◽  
Shallow Seas
Sign in / Sign up

Export Citation Format

Share Document