Effect and procedures of post-exposure bake temperature optimization on the CD uniformity in a mass production environment

2007 ◽  
Author(s):  
Kirsten Ruck ◽  
Heiko Weichert ◽  
Steffen Hornig ◽  
Frank Finger ◽  
Göran Fleischer ◽  
...  
Keyword(s):  
Mass Production ◽  
Production Environment ◽  
Post Exposure ◽  
Temperature Optimization ◽  
Post Exposure Bake

A novel post exposure bake technique to improve CD uniformity over product wafers

2005 ◽  
Author(s):  
Tomoyuki Takeishi ◽  
K. Hayasaki ◽  
Tsuyoshi Shibata
Keyword(s):  
Post Exposure ◽  
Post Exposure Bake

Sub-millisecond post exposure bake of chemically amplified resists by CO 2 laser heat treatment

2010 ◽  
Author(s):  
Byungki Jung ◽  
Jing Sha ◽  
Florencia Paredes ◽  
Christopher K. Ober ◽  
Michael O. Thompson ◽  
...  
Keyword(s):  
Heat Treatment ◽  
Laser Heat Treatment ◽  
Post Exposure ◽  
Chemically Amplified ◽  
Laser Heat ◽  
Post Exposure Bake ◽  
Chemically Amplified Resists

Effect of Post Exposure Bake in Inorganic Electron Beam Resist and Utilizing for Nanoimprint Mold

2009 ◽  
Vol 9 (1) ◽  
pp. 562-566 ◽  
Author(s):  
Miyako Shizuno ◽  
Jun Taniguchi ◽  
Kenta Ogino ◽  
Kiyoshi Ishikawa
Keyword(s):  
Electron Beam ◽  
Post Exposure ◽  
Post Exposure Bake

Examination Of The Mechanism Of The Post Exposure Bake Effect

1988 ◽  
Author(s):  
P. Trefonas III ◽  
B. K. Daniels ◽  
M. J. Eller ◽  
A. Zampini
Keyword(s):  
Post Exposure ◽  
Post Exposure Bake

Mathematical Modeling and Fuzzy Analysis of Hot Runner in Comparison to Cold Runner in Injection Moulding

2019 ◽  
Vol 18 (04) ◽  
pp. 657-676
Author(s):  
Sandeep Mathur ◽  
Ravinder Kumar ◽  
Vipul Mathur
Keyword(s):  
Mass Production ◽  
Weight Ratio ◽  
Production Environment ◽  
Slight Improvement ◽  
Decision Making Problem ◽  
Cycle Time Reduction ◽  
Index Value ◽  
Tooling Technology ◽  
Material Utilization ◽  
Insight Into

In a mass production environment of supply chains where volume of production runs into millions of parts per month where even the slight improvement in the manufacturing process through cycle time reduction or better material utilization has the potential to produce huge savings and productivity to match customer tact time, the paper serves a useful insight into appropriate tooling technology for moulding processes. Though there have been several studies on hot runner technology in injection molding processes vis a vis conventional cold runner technology, ultimate manufacturer still has to conduct trials and calculate ROIs, initial investment, quality and maintainability aspect to conclude if the manufacturer can go for hot runner or not. The paper lends a scientific expression to this decision making problem and offers a mathematical model with variables like Gross weight to Net Weight ratio, machine tonnage, volume involved. The user only has to put in the values to get an index value with a threshold number to decide if hot runner is viable for the component in hand or not.

Evaluation of the new-type ESPACER adopted for its removal after post-exposure bake process

2005 ◽  
Author(s):  
Yoshihiro Saida ◽  
Takashi Okubo ◽  
Jun Sasaki ◽  
Toshio Konishi ◽  
Motohiko Morita
Keyword(s):  
Post Exposure ◽  
New Type ◽  
Post Exposure Bake
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