In-situ critical dimension control during post-exposure bake with spectroscopic ellipsometry

2012 ◽  
Author(s):  
Yit Sung Ngo ◽  
Yifan Qu ◽  
Arthur Tay ◽  
Tong Heng Lee
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Critical Dimension ◽  
Post Exposure ◽  
Dimension Control ◽  
Post Exposure Bake

Spectroscopic ellipsometric scatterometry: sources of errors in critical dimension control

2003 ◽  
Author(s):  
Jerome Hazart ◽  
Gilles Grand ◽  
Philippe Thony ◽  
David Herisson ◽  
Stephanie Garcia ◽  
...  
Keyword(s):  
Critical Dimension ◽  
Dimension Control

scholarly journals Dimension control of in situ fabricated CsPbClBr2 nanocrystal films toward efficient blue light-emitting diodes

2020 ◽  
Vol 11 (1) ◽  
Author(s):  
Chenhui Wang ◽  
Dengbao Han ◽  
Junhui Wang ◽  
Yingguo Yang ◽  
Xinyue Liu ◽  
...  
Keyword(s):  
Quantum Well ◽  
Light Emitting Diodes ◽  
Blue Emission ◽  
Light Emitting ◽  
Mixed Ligands ◽  
Dimension Control ◽  
Nanocrystal Films ◽  
Width Distribution ◽  
Quantum Well Width

AbstractIn the field of perovskite light-emitting diodes (PeLEDs), the performance of blue emissive electroluminescence devices lags behind the other counterparts due to the lack of fabrication methodology. Herein, we demonstrate the in situ fabrication of CsPbClBr2 nanocrystal films by using mixed ligands of 2-phenylethanamine bromide (PEABr) and 3,3-diphenylpropylamine bromide (DPPABr). PEABr dominates the formation of quasi-two-dimensional perovskites with small-n domains, while DPPABr induces the formation of large-n domains. Strong blue emission at 470 nm with a photoluminescence quantum yield up to 60% was obtained by mixing the two ligands due to the formation of a narrower quantum-well width distribution. Based on such films, efficient blue PeLEDs with a maximum external quantum efficiency of 8.8% were achieved at 473 nm. Furthermore, we illustrate that the use of dual-ligand with respective tendency of forming small-n and large-n domains is a versatile strategy to achieve narrow quantum-well width distribution for photoluminescence enhancement.

scholarly journals Characterization and Quantification of Depletion and Accumulation Layers in Solid‐State Li + ‐Conducting Electrolytes Using In Situ Spectroscopic Ellipsometry

2021 ◽  
pp. 2100585
Author(s):  
Leon Katzenmeier ◽  
Leif Carstensen ◽  
Simon J. Schaper ◽  
Peter Müller‐Buschbaum ◽  
Aliaksandr S. Bandarenka
Keyword(s):  
Solid State ◽  
Spectroscopic Ellipsometry
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