Simultaneous measurement of film surface topography and thickness variation using white-light interferometry

Author(s):  
Katsuichi Kitagawa
2018 ◽  
Vol 45 (6) ◽  
pp. 0604001
Author(s):  
邓钦元 Deng Qinyuan ◽  
唐燕 Tang Yan ◽  
周毅 Zhou Yi ◽  
杨勇 Yang Yong ◽  
胡松 Hu Song

2014 ◽  
Vol 34 (2) ◽  
pp. 0212003
Author(s):  
郭彤 Guo Tong ◽  
李峰 Li Feng ◽  
倪连峰 Ni Lianfeng ◽  
陈津平 Chen Jinping ◽  
傅星 Fu Xing ◽  
...  

2011 ◽  
Vol 19 (7) ◽  
pp. 1612-1619
Author(s):  
邹文栋 ZOU Wen-dong ◽  
黄长辉 HUANG Chang-hui ◽  
郑玱 ZHENG Qiang ◽  
徐周珏 XU Zhou-jue ◽  
董娜 DONG Na

1992 ◽  
Vol 28 (6) ◽  
pp. 553 ◽  
Author(s):  
S. Chen ◽  
A.W. Palmer ◽  
K.T.V. Grattan ◽  
B.T. Meggitt

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