Simultaneous measurement of surface profile and thickness variation of transparent parallel plate using wavelength tuning Fizeau interferometer

2018 ◽  
Author(s):  
Yangjin Kim ◽  
Naohiko Sugita ◽  
Mamoru Mitsuishi
Keyword(s):  
Simultaneous Measurement ◽  
Parallel Plate ◽  
Surface Profile ◽  
Wavelength Tuning ◽  
Thickness Variation ◽  
Fizeau Interferometer

Simultaneous measurement of the surface shape and thickness for an optical flat with a wavelength-tuning Fizeau interferometer with suppression of drift error

2020 ◽  
Vol 59 (4) ◽  
pp. 991
Author(s):  
Yangjin Kim ◽  
Younghoon Moon ◽  
Kenichi Hibino ◽  
Naohiko Sugita ◽  
Mamoru Mitsuishi
Keyword(s):  
Simultaneous Measurement ◽  
Wavelength Tuning ◽  
Surface Shape ◽  
Fizeau Interferometer

scholarly journals Algorithm for Surfaces Profiles and Thickness Variation Measurement of a Transparent Plate Using a Fizeau Interferometer with Wavelength Tuning

2019 ◽  
Vol 9 (11) ◽  
pp. 2349 ◽  
Author(s):  
Tao Sun ◽  
Weiwei Zheng ◽  
Yingjie Yu ◽  
Ketao Yan ◽  
Anand Asundi ◽  
...  
Keyword(s):  
Rear Surface ◽  
Surface Profile ◽  
Measuring Method ◽  
Processing Technique ◽  
Repeated Measurements ◽  
Thickness Variation ◽  
Fizeau Interferometer ◽  
Transparent Plate ◽  
Surface Profiles ◽  
Step Algorithm

An interferogram obtained from a transparent plate contains information on the profiles of both surfaces and on the thickness variation. The present work is devoted to the processing of interferograms of this type. The processing technique is based on a 36-step algorithm developed by the authors for characterization of transparent plates having approximately equal reflections from both sides. The algorithm utilizes weighted multi-step phase shifting that enables one not only separately to extract the front and rear surface profiles together with the thickness variation of the tested plate but also to suppress the coupling errors between the higher harmonics and phase-shift deviation. The proposed measuring method was studied on a wavelength tunable Fizeau interferometer. The tested sample had an optical thickness and surface profile deviations equal to 0.51 µm, 1.38 µm and 0.89 µm, respectively. According to the results obtained using 10 repeated measurements, the root mean square (RMS) errors for determining both surface profiles did not exceed 1.5 nm. Experimental results show that the setup and presented 36-step algorithm are suitable for the measurement of a transparent plate of arbitrary thickness.

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