Measurement of excimer-laser-induced birefringence in fused silica and calcium fluoride

2000 ◽  
Author(s):  
Baoliang B. Wang
Keyword(s):  
Excimer Laser ◽  
Calcium Fluoride ◽  
Fused Silica

Excimer-laser-induced degradation of fused silica and calcium fluoride for 193-nm lithographic applications

1999 ◽  
Vol 24 (1) ◽  
pp. 58 ◽  
Author(s):  
V. Liberman ◽  
M. Rothschild ◽  
J. H. C. Sedlacek ◽  
R. S. Uttaro ◽  
A. Grenville ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Calcium Fluoride ◽  
Fused Silica ◽  
193 Nm

Long-term 193-nm laser-induced degradation of fused silica and calcium fluoride

1999 ◽  
Author(s):  
Vladimir Liberman ◽  
Mordechai Rothschild ◽  
Jan H. C. Sedlacek ◽  
Ray S. Uttaro ◽  
Allen K. Bates ◽  
...  
Keyword(s):  
Calcium Fluoride ◽  
Fused Silica ◽  
193 Nm

Application Study on Fused Silica Prisms in Excimer Laser Spectrum Control

2013 ◽  
Vol 40 (4) ◽  
pp. 0402008
Author(s):  
单耀莹 Shan Yaoying ◽  
赵江山 Zhao Jiangshan ◽  
李慧 Li Hui ◽  
王倩 Wang Qian ◽  
沙鹏飞 Sha Pengfei ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Fused Silica ◽  
Application Study ◽  
Laser Spectrum ◽  
Spectrum Control

Dependence of the damage and transmission properties of fused silica fibers on the excimer laser wavelength

1988 ◽  
Vol 27 (15) ◽  
pp. 3124 ◽  
Author(s):  
Rod S. Taylor ◽  
Kurt E. Leopold ◽  
Robert K. Brimacombe ◽  
Stephen Mihailov
Keyword(s):  
Excimer Laser ◽  
Laser Wavelength ◽  
Fused Silica ◽  
Transmission Properties ◽  
Silica Fibers

Laser-induced front side etching of fused silica with XeF excimer laser using thin metal layers

2012 ◽  
Vol 258 (23) ◽  
pp. 9138-9142 ◽  
Author(s):  
Pierre Lorenz ◽  
Martin Ehrhardt ◽  
Anja Wehrmann ◽  
Klaus Zimmer
Keyword(s):  
Excimer Laser ◽  
Fused Silica ◽  
Thin Metal ◽  
Front Side ◽  
Metal Layers

Excimer laser ablation of (001) textured ZnO waveguiding films on fused silica

1997 ◽  
Vol 195 (1) ◽  
pp. 179-182
Author(s):  
W. S. Hu ◽  
Z. G. Liu ◽  
X. L. Guo ◽  
J. Sun ◽  
S. B. Xiong ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Excimer Laser ◽  
Fused Silica ◽  
Excimer Laser Ablation
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