Long-term 193-nm laser-induced degradation of fused silica and calcium fluoride

1999 ◽  
Author(s):  
Vladimir Liberman ◽  
Mordechai Rothschild ◽  
Jan H. C. Sedlacek ◽  
Ray S. Uttaro ◽  
Allen K. Bates ◽  
...  
Keyword(s):  
Calcium Fluoride ◽  
Fused Silica ◽  
193 Nm

Compaction of fused silica under low-fluence/long-term 193-nm irradiation

1997 ◽  
Author(s):  
Charlene M. Smith ◽  
Nicholas F. Borrelli ◽  
Douglas C. Allan ◽  
Thomas P. Seward
Keyword(s):  
Fused Silica ◽  
193 Nm

Absolute refractive indices and thermal coefficients of fused silica and calcium fluoride near 193 nm

1998 ◽  
Vol 37 (25) ◽  
pp. 5964 ◽  
Author(s):  
Rajeev Gupta ◽  
John H. Burnett ◽  
Ulf Griesmann ◽  
Matthew Walhout
Keyword(s):  
Calcium Fluoride ◽  
Fused Silica ◽  
Refractive Indices ◽  
193 Nm

Excimer-laser-induced degradation of fused silica and calcium fluoride for 193-nm lithographic applications

1999 ◽  
Vol 24 (1) ◽  
pp. 58 ◽  
Author(s):  
V. Liberman ◽  
M. Rothschild ◽  
J. H. C. Sedlacek ◽  
R. S. Uttaro ◽  
A. Grenville ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Calcium Fluoride ◽  
Fused Silica ◽  
193 Nm

Densification of fused silica under 193-nm excitation

1997 ◽  
Vol 14 (7) ◽  
pp. 1606 ◽  
Author(s):  
N. F. Borrelli ◽  
Charlene Smith ◽  
Douglas C. Allan ◽  
T. P. Seward
Keyword(s):  
Fused Silica ◽  
193 Nm

scholarly journals A new long-term indentation relaxation method to measure creep properties at the micro-scale with application to fused silica and PMMA

2019 ◽  
Vol 137 ◽  
pp. 103095 ◽  
Author(s):  
P. Baral ◽  
G. Guillonneau ◽  
G. Kermouche ◽  
J.-M. Bergheau ◽  
J.-L. Loubet
Keyword(s):  
Relaxation Method ◽  
Fused Silica ◽  
Creep Properties ◽  
Micro Scale

Fused silica long-term stability: case studies

2011 ◽  
Author(s):  
Maurizio Vannoni ◽  
Andrea Sordini ◽  
Giuseppe Molesini
Keyword(s):  
Case Studies ◽  
Fused Silica ◽  
Term Stability ◽  
Long Term Stability

scholarly journals Bulk scattering properties of synthetic fused silica at 193 nm

2006 ◽  
Vol 14 (22) ◽  
pp. 10537 ◽  
Author(s):  
Sven Schröeder ◽  
Mathias Kamprath ◽  
Angela Duparré ◽  
Andreas Tünnermann ◽  
Bodo Kühn ◽  
...  
Keyword(s):  
Fused Silica ◽  
Bulk Scattering ◽  
193 Nm

Biomimetic model of a sponge-spicular optical fiber—mechanical properties and structure

2001 ◽  
Vol 16 (5) ◽  
pp. 1420-1428 ◽  
Author(s):  
M. Sarikaya ◽  
H. Fong ◽  
N. Sunderland ◽  
B. D. Flinn ◽  
G. Mayer ◽  
...  
Keyword(s):  
Elastic Modulus ◽  
Optical Fibers ◽  
Circular Cross Section ◽  
Fused Silica ◽  
Atomic Force ◽  
Commercial Glass ◽  
Bend Tests ◽  
Point Bend ◽  
Thick Layers

Nanomechanical properties, nanohardness and elastic modulus, of an Antarctic sponge Rosella racovitzea were determined by using a vertical indentation system attached to an atomic force microscope. The Rosella spicules, known to have optical waveguide properties, are 10–20 cm long with a circular cross section of diameter 200–600 μm. The spicules are composed of 2–10-μm-thick layers of siliceous material that has no detectable crystallinity. Measurements through the thickness of the spicules indicated uniform properties regardless of layering. Both the elastic modulus and nanohardness values of the spicules are about half of that of either fused silica or commercial glass optical fibers. The fracture strength and fracture energy of the spicules, determined by 3-point bend tests, are several times those of silica rods of similar diameter. These sponge spicules are highly flexible and tough possibly because of their layered structure and hydrated nature of the silica. The spicules offer bioinspired lessons for potential biomimetic design of optical fibers with long-term durability that could potentially be fabricated at room temperature in aqueous solutions.

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