Lithographic analysis of multipass gray writing strategy for electron-beam pattern generation

1999 ◽  
Author(s):  
Jan M. Chabala ◽  
Frank E. Abboud ◽  
Robert L. Dean ◽  
Suzanne Weaver ◽  
Damon M. Cole ◽  
...  
Keyword(s):  
Electron Beam ◽  
Pattern Generation ◽  
Beam Pattern ◽  
Writing Strategy

Electron beam pattern generation in thin‐film organic dianhydrides

1982 ◽  
Vol 40 (1) ◽  
pp. 93-95 ◽  
Author(s):  
Paul H. Schmidt ◽  
David C. Joy ◽  
Martin L. Kaplan ◽  
William L. Feldmann
Keyword(s):  
Thin Film ◽  
Electron Beam ◽  
Pattern Generation ◽  
Beam Pattern

Advanced electron-beam pattern generation technology for 180-nm masks

1997 ◽  
Author(s):  
Frank E. Abboud ◽  
Charles A. Sauer ◽  
William Wang ◽  
Matthew Vernon ◽  
Richard Prior ◽  
...  
Keyword(s):  
Electron Beam ◽  
Pattern Generation ◽  
Beam Pattern ◽  
Generation Technology

A Fast Turn Around Electron-Beam Pattern Generation System

1973 ◽  
Vol 10 (6) ◽  
pp. 1016-1019 ◽  
Author(s):  
B. P. Piwczyk ◽  
K. G. McQuhae
Keyword(s):  
Electron Beam ◽  
Pattern Generation ◽  
Beam Pattern ◽  
Generation System

Further advances in electron-beam pattern generation technology for 180-nm masks

1998 ◽  
Author(s):  
Frank E. Abboud ◽  
Charles A. Sauer ◽  
Matthew Vernon ◽  
Thomas P. Coleman ◽  
Robert L. Dean ◽  
...  
Keyword(s):  
Electron Beam ◽  
Pattern Generation ◽  
Beam Pattern ◽  
Generation Technology

Device Photolithography: The Electron Beam Pattern Generator

1970 ◽  
Vol 49 (9) ◽  
pp. 2077-2094 ◽  
Author(s):  
W. Samaroo ◽  
J. Raamot ◽  
P. Parry ◽  
G. Robertson
Keyword(s):  
Electron Beam ◽  
Pattern Generator ◽  
Beam Pattern

Raster shaped beam pattern generation

1999 ◽  
Vol 17 (6) ◽  
pp. 2927 ◽  
Author(s):  
S. A. Rishton ◽  
J. K. Varner ◽  
L. H. Veneklasen ◽  
V. Boegli ◽  
A. L. Sagle ◽  
...  
Keyword(s):  
Pattern Generation ◽  
Beam Pattern ◽  
Shaped Beam

A pattern generation technique for serial electron‐beam microfabrication systems

1975 ◽  
Vol 12 (6) ◽  
pp. 1246-1250 ◽  
Author(s):  
F. S. Ozdemir ◽  
C. R. Buckey ◽  
E. D. Wolf
Keyword(s):  
Electron Beam ◽  
Pattern Generation ◽  
Generation Technique
Sign in / Sign up

Export Citation Format

Share Document