A pattern generation technique for serial electron‐beam microfabrication systems
1975 ◽
Vol 12
(6)
◽
pp. 1246-1250
◽
Keyword(s):
Keyword(s):
1996 ◽
Vol 143
(1)
◽
pp. 17
1989 ◽
Vol 9
(1-4)
◽
pp. 495-497
◽
2003 ◽
Vol 20
(2)
◽
pp. 248
◽
2018 ◽
Vol 9
◽
pp. 2581-2598
◽