ACS Symposium Series - Polymers in Microlithography
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Published By American Chemical Society

0841217017, 0841212686
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Polysilanes: Solution Photochemistry and Deep-UV Lithography

1989 ◽  
pp. 115-132 ◽  
Author(s):  
R. D. Miller ◽  
G. Wallraff ◽  
N. Clecak ◽  
R. Sooriyakumaran ◽  
J. Michl ◽  
...  
Keyword(s):  
Uv Lithography ◽  
Deep Uv

Mechanism of UV- and VUV-Induced Etching of Poly(methyl methacrylate)

1989 ◽  
pp. 424-436 ◽  
Author(s):  
Nobuo Ueno ◽  
Tsuneo Mitsuhata ◽  
Kazuyuki Sugita ◽  
Kenichiro Tanaka
Keyword(s):  
Methyl Methacrylate ◽  
Poly Methyl Methacrylate

scholarly journals Preface

1989 ◽  
pp. xi-xii
Author(s):  
ELSA REICHMANIS ◽  
SCOTT A. MACDONALD ◽  
TAKAO IWAYANAGI
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