Laser processing of sol-gel coatings for infrared applications

1997 ◽  
Author(s):  
Guanming Li ◽  
Larry W. Burggraf
Keyword(s):  
Laser Processing ◽  
Sol Gel

Laser processing of channel waveguide structures in sol-gel coatings

1990 ◽  
Author(s):  
Brian D. Fabes ◽  
Douglas J. Taylor ◽  
Lori Weisenbach ◽  
M. M. Stuppi ◽  
D. L. Klein ◽  
...  
Keyword(s):  
Laser Processing ◽  
Sol Gel ◽  
Channel Waveguide

Laser processing of sol-gel coatings

1992 ◽  
Vol 147-148 ◽  
pp. 457-462 ◽  
Author(s):  
D.J. Taylor ◽  
B.D. Fabes
Keyword(s):  
Laser Processing ◽  
Sol Gel

Laser Processing of 2-D and 3-D Structures for Tunable Embedded Capacitors

2011 ◽  
Vol 2011 (DPC) ◽  
pp. 001949-001976
Author(s):  
Rabindra N. Das ◽  
Timothy E. Antesberger ◽  
Francesco Marconi ◽  
Frank D. Egitto ◽  
Mark D. Poliks ◽  
...  
Keyword(s):  
Laser Processing ◽  
High Speed ◽  
Laser System ◽  
Sol Gel ◽  
Single Layer ◽  
Laser Micromachining ◽  
Embedded Capacitors ◽  
Embedded Capacitor ◽  
Material Formulation ◽  
Tunable Device

Material formulation, structuring, and modification are key to increasing the unit volume complexity and density of next generation electronic packaging products. Laser processing is finding an increasing number of applications in the fabrication of these advanced microelectronic devices. This is due, in part, to the ability to achieve highly localized treatment of materials with a spatial resolution of tens of microns. In addition, the process is data-driven, that is, patterns can be generated without the need for masking materials. In the present investigation, a variety of structures have been generated in polymer nanocomposites, nanoparticle films, and sol-gel thin films using a computer-controlled laser system. Specifically, micromachining technology has been used to produce both variable-thickness and discrete capacitors from a single sheet (layer) of capacitor material, such that both types of structures can be integrated into the same layer. In addition, the laser micromachining technology has been extended to design and develop new vertical multilayer embedded capacitors for high speed applications. High speed packages require thick dielectrics. Calculations show that multilayer vertical capacitors can be better than thick capacitors formed from a single layer. In general, multilayer embedded capacitors are fabricated by repeated lamination of resin-coated copper, or pre-preg with a capacitor core. This is a time consuming, lengthy process. As an alternative, we have deposited a single, thick capacitance layer, and subsequent laser micromachining has been used to form multiple parallel channels of a controlled depth. Metal deposition in the channels results in a multilayer embedded capacitor structure. Lasers micromaching can also provide various complex patterns such as 3-D spiral channels within a dielectric or magnetically active nanocomposite, subsequently filled with conducting materials to form inductors. This technique can be used to prepare inductors and capacitors in the same layer of nanocomposite material. Hence, the technique can be used to generate multi-functional structures for tunable device applications.

Excimer laser processing of ZnO thin films prepared by the sol–gel process

2007 ◽  
Vol 254 (4) ◽  
pp. 855-858 ◽  
Author(s):  
R.J. Winfield ◽  
L.H.K. Koh ◽  
Shane O’Brien ◽  
Gabriel M. Crean
Keyword(s):  
Thin Films ◽  
Excimer Laser ◽  
Laser Processing ◽  
Sol Gel ◽  
Zno Thin Films ◽  
Sol Gel Process

Laser processing of sol-gel-derived multilayer interference filters

1992 ◽  
Author(s):  
Dunbar P. Birnie III ◽  
Sharon M. Melpolder ◽  
Brian D. Fabes ◽  
Brian J. Zelinski ◽  
Michael J. Hanrahan ◽  
...  
Keyword(s):  
Laser Processing ◽  
Sol Gel ◽  
Interference Filters
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