Silicon Surface Passivation by Laser Processing a Sol–Gel TiOx Thin Film

ACS Applied Energy Materials ◽

10.1021/acsaem.8b01043 ◽

2018 ◽

Cited By ~ 3

Author(s):

Zeming Sun ◽

Xiaoyu Deng ◽

Joshua J. Choi ◽

Mool C. Gupta

Keyword(s):

Thin Film ◽

Laser Processing ◽

Silicon Surface ◽

Surface Passivation ◽

Sol Gel ◽

Silicon Surface Passivation

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High-resistivity silicon surface passivation for the thin-film MCM-D technology

Digest of Papers. 2005 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, 2005. ◽

10.1109/smic.2005.1587901 ◽

2006 ◽

Cited By ~ 4

Author(s):

G. Posada ◽

G. Carchon ◽

P. Soussan ◽

G. Poesen ◽

B. Nauwelaers ◽

...

Keyword(s):

Thin Film ◽

Silicon Surface ◽

Surface Passivation ◽

High Resistivity ◽

High Resistivity Silicon ◽

Silicon Surface Passivation

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Aluminium oxide thin film deposited by spray coating for p-type silicon surface passivation

Solar Energy Materials and Solar Cells ◽

10.1016/j.solmat.2019.03.048 ◽

2019 ◽

Vol 197 ◽

pp. 93-98 ◽

Cited By ~ 6

Author(s):

Kalaivani Srinivasan ◽

Anil Kottantharayil

Keyword(s):

Thin Film ◽

Silicon Surface ◽

Surface Passivation ◽

Aluminium Oxide ◽

Spray Coating ◽

Oxide Thin Film ◽

Type Silicon ◽

P Type ◽

Silicon Surface Passivation

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Spray coated aluminum oxide thin film for P-type crystalline silicon surface passivation

2015 IEEE 42nd Photovoltaic Specialist Conference (PVSC) ◽

10.1109/pvsc.2015.7356402 ◽

2015 ◽

Cited By ~ 2

Author(s):

S. Kalaivani ◽

Anil Kottantharayil

Keyword(s):

Thin Film ◽

Aluminum Oxide ◽

Silicon Surface ◽

Surface Passivation ◽

Crystalline Silicon ◽

Oxide Thin Film ◽

P Type ◽

Silicon Surface Passivation

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Ultrathin Aluminum Oxide Films Induced by Rapid Thermal Annealing for Effective Silicon Surface Passivation

physica status solidi (RRL) - Rapid Research Letters ◽

10.1002/pssr.202100267 ◽

2021 ◽

Author(s):

Jun Chen ◽

Peng Wang ◽

Can Liu ◽

Guoqiang Yu ◽

Tao Wang ◽

...

Keyword(s):

Aluminum Oxide ◽

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Silicon Surface ◽

Surface Passivation ◽

Oxide Films ◽

Silicon Surface Passivation

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Improved Silicon Surface Passivation of APCVD Al2O3 by Rapid Thermal Annealing

Energy Procedia ◽

10.1016/j.egypro.2016.07.088 ◽

2016 ◽

Vol 92 ◽

pp. 317-325 ◽

Cited By ~ 6

Author(s):

Lachlan E. Black ◽

Thomas Allen ◽

Keith R. McIntosh ◽

Andres Cuévas

Keyword(s):

Thermal Annealing ◽

Rapid Thermal Annealing ◽

Silicon Surface ◽

Surface Passivation ◽

Silicon Surface Passivation

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Silicon surface passivation using thin HfO2 films by atomic layer deposition

Applied Surface Science ◽

10.1016/j.apsusc.2015.09.020 ◽

2015 ◽

Vol 357 ◽

pp. 635-642 ◽

Cited By ~ 26

Author(s):

Jhuma Gope ◽

Vandana ◽

Neha Batra ◽

Jagannath Panigrahi ◽

Rajbir Singh ◽

...

Keyword(s):

Atomic Layer Deposition ◽

Silicon Surface ◽

Surface Passivation ◽

Atomic Layer ◽

Layer Deposition ◽

Silicon Surface Passivation

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Atomic layer deposited dielectric and/or semiconducting oxide bilayers for crystalline silicon surface passivation

Energy Procedia ◽

10.1016/j.egypro.2017.09.303 ◽

2017 ◽

Vol 124 ◽

pp. 302-306 ◽

Cited By ~ 2

Author(s):

Jagannath Panigrahi ◽

Vandana Panwar ◽

Rajbir Singh ◽

P.K. Singh

Keyword(s):

Silicon Surface ◽

Surface Passivation ◽

Crystalline Silicon ◽

Atomic Layer ◽

Silicon Surface Passivation

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Crystalline silicon surface passivation by amorphous silicon carbide films

Solar Energy Materials and Solar Cells ◽

10.1016/j.solmat.2006.08.004 ◽

2007 ◽

Vol 91 (2-3) ◽

pp. 174-179 ◽

Cited By ~ 11

Author(s):

M. Vetter ◽

I. Martín ◽

R. Ferre ◽

M. Garín ◽

R. Alcubilla

Keyword(s):

Silicon Carbide ◽

Amorphous Silicon ◽

Silicon Surface ◽

Surface Passivation ◽

Crystalline Silicon ◽

Amorphous Silicon Carbide ◽

Silicon Surface Passivation

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Erratum: “On the location and stability of charge in SiO2/SiNx dielectric double layers used for silicon surface passivation” [J. Appl. Phys. 115, 144105 (2014)]

Journal of Applied Physics ◽

10.1063/1.4915629 ◽

2015 ◽

Vol 117 (12) ◽

pp. 129901 ◽

Cited By ~ 1

Author(s):

Ruy S. Bonilla ◽

Christian Reichel ◽

Martin Hermle ◽

Peter R. Wilshaw

Keyword(s):

Silicon Surface ◽

Surface Passivation ◽

Double Layers ◽

Silicon Surface Passivation

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Silicon Surface Passivation by Al2O3: Effect of ALD Reactants

Energy Procedia ◽

10.1016/j.egypro.2011.06.201 ◽

2011 ◽

Vol 8 ◽

pp. 681-687 ◽

Cited By ~ 25

Author(s):

Päivikki Repo ◽

Heli Talvitie ◽

Shuo Li ◽

Jarmo Skarp ◽

Hele Savin

Keyword(s):

Silicon Surface ◽

Surface Passivation ◽

Silicon Surface Passivation

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