Recent developments of industrial excimer laser technology

1997 ◽  
Author(s):  
Uwe Stamm ◽  
Rainer Paetzel ◽  
Igor Bragin ◽  
Juergen Kleinschmidt ◽  
Frank Voss ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Laser Technology ◽  
Recent Developments

Recent developments in metal processing with pulsed laser technology

1996 ◽  
Vol 106 ◽  
pp. 228-234 ◽  
Author(s):  
J. Uhlenbusch ◽  
U. Bielesch ◽  
S. Klein ◽  
M. Napp ◽  
J.H. Schäfer
Keyword(s):  
Pulsed Laser ◽  
Laser Technology ◽  
Recent Developments ◽  
Metal Processing

Latest Gas Turbine Repair Techniques Using Laser Technology

1998 ◽  
Author(s):  
A.D. Williams ◽  
J.L. Humphries
Keyword(s):  
Gas Turbine ◽  
Repair Process ◽  
Turbine Engines ◽  
Gas Turbine Engines ◽  
Directionally Solidified ◽  
Laser Technology ◽  
Higher Power ◽  
Recent Developments ◽  
The Cost ◽  
Repair Techniques

Abstract Over recent years, with the drive for new higher power, higher efficiency Gas Turbine engines, manufacturers have had to look at new alloys and new coating techniques to achieve and support the industry requirements. Repair technology has therefore had to keep pace with the OEM advances and much research and development has been undertaken in developing new repair processes. Many of the alloys now used are directionally solidified or single crystal, which until now have been deemed irreparable by traditional welding techniques. Recent developments in the use of lasers have not only rendered these alloys salvageable but have also reduced the overall repair time and therefore the cost. This paper looks at the use of laser technology as a repair process for gas turbine components, touching briefly on laser cutting and drilling but concentrating mainly on laser powder feed welding and its applications.

Spectral-narrowing techniques for excimer laser oscillators

1985 ◽  
Vol 63 (2) ◽  
pp. 214-219 ◽  
Author(s):  
Terrence J. McKee
Keyword(s):  
Excimer Laser ◽  
Grazing Incidence ◽  
Broadband Noise ◽  
Spectral Narrowing ◽  
Fabry Perot ◽  
Laser Oscillators ◽  
Recent Developments ◽  
Overall Efficiency

Various techniques for use in spectral narrowing and tuning of excimer laser oscillators are described. Intracavity dispersive elements include Littrow grating, grazing-incidence grating, prisms, and Fabry–Perot etalons. Recent developments to improve overall efficiency and reduce broadband noise are outlined.

Laser Assisted Machining: An Overview

1997 ◽  
Vol 119 (4B) ◽  
pp. 766-769 ◽  
Author(s):  
G. Chryssolouris ◽  
N. Anifantis ◽  
S. Karagiannis
Keyword(s):  
Scientific Work ◽  
Research Trends ◽  
Experimental Investigations ◽  
Laser Machining ◽  
Relevant Research ◽  
Research Topics ◽  
Laser Technology ◽  
Laser Assisted Machining ◽  
Recent Developments ◽  
Potential Applications

Since laser technology has considerable synergy with machining technologies, Laser Machining (LM) and Laser Assisted Machining (LAM) are relevant research topics. This paper attempts to give an overview of recent developments and research trends. Although scientific work on this area has contributed to the understanding of the process, there are still unresolved problems regarding the limitations of the techniques, optimum machining conditions, etc. The outcome of experimental investigations on LAM shows potential applications for this process but there are several issues to be resolved.

scholarly journals Overview Of Recent Advances In Excimer Laser Technology At Los Alamos

1989 ◽  
Author(s):  
Irving J. Bigio ◽  
Robert C. Sze ◽  
Antoinette J. Taylor ◽  
Robert F. Gibson
Keyword(s):  
Excimer Laser ◽  
Los Alamos ◽  
Laser Technology ◽  
Recent Advances

Extremely long life excimer laser technology for multi-patterning lithography

2018 ◽  
Author(s):  
Yousuke Fujimaki ◽  
Makoto Tanaka ◽  
Takashi Itou ◽  
Hirotaka Miyamoto ◽  
Miwa Igarashi ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Laser Technology ◽  
Long Life

The Development of Excimer Laser Technology – History and Future Prospects

2001 ◽  
Vol 215 (12) ◽  
Author(s):  
D. Basting ◽  
U. Stamm
Keyword(s):  
Excimer Laser ◽  
Fused Silica ◽  
Pulsed Power ◽  
Excimer Lasers ◽  
Laser Technology ◽  
Research Areas ◽  
Technological Developments ◽  
Laser Development ◽  
Application Requirements ◽  
User Friendly

With focus on commercial aspects the paper reviews the historical development and various technological achievements in the field of excimer lasers since their discovery in 1970. The first commercial excimer laser model in the world, the EMG 500 from Lambda Physik was operating at maximum repetition rates of only 20 Hz, whereas today multi kHz excimer lasers as the NovaLine industrial lasers are available. In 2000, Lambda Physik introduced the most powerful commercial excimer laser, the Lambda Steel with 300 W output power having extremely high stability.In the more than 30 years of excimer lasers their properties have been studied in a multitude of research laboratories at universities, institutes, national laboratories, and industry. In the attempts to reach parameters in the UV never seen before, energies ranging from mJ to kJ, pulse durations from sub μs down to fs, spectral bandwidths from fractions of 1 nm down to less then 0.1 pm, and beam divergence from 10 mrad down to 10 μrad could be demonstrated at the various excimer lasers wavelengts. Over the years various technological achievements like the NovaTube laser chamber technology, the NovaPowerSwitch pulsed power modules and the HaloSafe fluorine and chlorine generators could be made which make the use of excimer lasers simple and user friendly. Recently, the development of DuraTube technology gave a strong push towards the development of high power 157 nm laser technology for microlithography and laser based micro-machining of “difficult” materials as fused silica or teflon.The paper describes important steps and quantum leaps in developing and improving excimer lasers. Since a large part of excimer laser development was driven by application requirements some applications developed over the years are touched as well – including early photochemistry and dye laser pumping in F. P. Schäfers laboratories. Finally, currently ongoing and for the future expected technological developments are discussed which will strengthen the position of excimer lasers as user friendly work horses in many industrial and research areas.

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