Spectral-narrowing techniques for excimer laser oscillators
Keyword(s):
Various techniques for use in spectral narrowing and tuning of excimer laser oscillators are described. Intracavity dispersive elements include Littrow grating, grazing-incidence grating, prisms, and Fabry–Perot etalons. Recent developments to improve overall efficiency and reduce broadband noise are outlined.
1967 ◽
Vol 28
(C2)
◽
pp. C2-226-C2-229
◽
1967 ◽
Vol 28
(C2)
◽
pp. C2-280-C2-286
◽
1995 ◽
Vol 4
(4)
◽
pp. 246-251
◽