AFM line space trench and depth measurement of fan-out fine-pitch high aspect ratio redistribution layer structure

2021 ◽  
Author(s):  
Sunghua Zhong ◽  
Liang-Pin Chen
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Layer Structure ◽  
Depth Measurement ◽  
Fine Pitch ◽  
Line Space

Via-First Process to Enable Copper Metallization of Glass Interposers With High-Aspect-Ratio, Fine-Pitch Through-Package-Vias

2017 ◽  
Vol 7 (4) ◽  
pp. 544-551 ◽  
Author(s):  
Timothy B. Huang ◽  
Bruce Chou ◽  
Jialing Tong ◽  
Tomonori Ogawa ◽  
Venky Sundaram ◽  
...  
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Copper Metallization ◽  
Fine Pitch

Microfabrication of fine-pitch high aspect ratio Faraday cup arrays in silicon

2007 ◽  
Vol 137 (2) ◽  
pp. 296-301 ◽  
Author(s):  
Christopher A. Bower ◽  
Kristin H. Gilchrist ◽  
Matthew R. Lueck ◽  
Brian R. Stoner
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Faraday Cup ◽  
Fine Pitch
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