Study of high throughput EUV mask pattern defect inspection technologies using multibeam electron optics

2021 ◽  
Author(s):  
Hidekazu Takekoshi ◽  
Riki Ogawa ◽  
John G. Hartley ◽  
David J. Pinckeny ◽  
Atsushi Ando ◽  
...  
Keyword(s):  
High Throughput ◽  
Electron Optics ◽  
Mask Pattern ◽  
Defect Inspection

Electron optics for high throughput low energy electron microscopy

2007 ◽  
Vol 601 (20) ◽  
pp. 4733-4741 ◽  
Author(s):  
M. Mankos ◽  
D. Adler ◽  
L. Veneklasen ◽  
E. Munro
Keyword(s):  
Electron Microscopy ◽  
High Throughput ◽  
Low Energy ◽  
Energy Electron ◽  
Electron Optics ◽  
Low Energy Electron

Evaluation of EUVL mask pattern defect inspection using 199nm inspection tool with super-resolution method

2009 ◽  
Author(s):  
Hiroyuki Shigemura ◽  
Tsuyoshi Amano ◽  
Yasushi Nishiyama ◽  
Osamu Suga ◽  
Yukiyasu Arisawa ◽  
...  
Keyword(s):  
Super Resolution ◽  
Mask Pattern ◽  
Defect Inspection ◽  
Resolution Method

Study of high throughput EUV mask pattern inspection technologies using multi e-Beam optics

2021 ◽  
Author(s):  
Tadayuki Sugimori ◽  
Riki Ogawa ◽  
Hidekazu Takekoshi ◽  
John G. Hartley ◽  
David J. Pinckeny ◽  
...  
Keyword(s):  
High Throughput ◽  
Mask Pattern ◽  
Beam Optics

Evaluation of EUVL-mask pattern defect inspection using 199-nm inspection optics

2007 ◽  
Author(s):  
Tsuyoshi Amano ◽  
Yasushi Nishiyama ◽  
Hiroyuki Shigemura ◽  
Tsuneo Terasawa ◽  
Osamu Suga ◽  
...  
Keyword(s):  
Mask Pattern ◽  
Defect Inspection

High-throughput defect inspection for arbitrarily shaped EUV absorber patterns (Conference Presentation)

2018 ◽  
Author(s):  
Patrick Helfenstein ◽  
Iacopo Mochi ◽  
Rajendran Rajeev ◽  
Sara Fernandez ◽  
Dimitrios Kazazis ◽  
...  
Keyword(s):  
High Throughput ◽  
Defect Inspection

Novel defect inspection method for the LSI mask pattern data

1994 ◽  
Author(s):  
Touru Miyauchi ◽  
Kenichi Kobayashi ◽  
Kazumasa Shigematsu
Keyword(s):  
Mask Pattern ◽  
Defect Inspection ◽  
Inspection Method
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