Patterning of defect arrays with e-beam lithography used to develop a high throughput e-beam defect inspection tool

Kevin D. Cummings; Ben Bunday; Matt Malloy; John Hartley; Laila Banu; M. Mellish; Weilun Chao; A. R. Bleier; A. Banerjee

doi:10.1116/1.4934052

Patterning of defect arrays with e-beam lithography used to develop a high throughput e-beam defect inspection tool

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.4934052 ◽

2015 ◽

Vol 33 (6) ◽

pp. 06FD03 ◽

Cited By ~ 4

Author(s):

Kevin D. Cummings ◽

Ben Bunday ◽

Matt Malloy ◽

John Hartley ◽

Laila Banu ◽

...

Keyword(s):

High Throughput ◽

Defect Inspection

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Study of high throughput EUV mask pattern defect inspection technologies using multibeam electron optics

Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV ◽

10.1117/12.2583613 ◽

2021 ◽

Author(s):

Hidekazu Takekoshi ◽

Riki Ogawa ◽

John G. Hartley ◽

David J. Pinckeny ◽

Atsushi Ando ◽

...

Keyword(s):

High Throughput ◽

Electron Optics ◽

Mask Pattern ◽

Defect Inspection

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High-throughput defect inspection for arbitrarily shaped EUV absorber patterns (Conference Presentation)

Metrology, Inspection, and Process Control for Microlithography XXXII ◽

10.1117/12.2297587 ◽

2018 ◽

Author(s):

Patrick Helfenstein ◽

Iacopo Mochi ◽

Rajendran Rajeev ◽

Sara Fernandez ◽

Dimitrios Kazazis ◽

...

Keyword(s):

High Throughput ◽

Defect Inspection

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Pre- and post-thinning silicon thickness mapping using a high throughput defect inspection system for advanced 3D IC packaging

2012 IEEE 14th Electronics Packaging Technology Conference (EPTC) ◽

10.1109/eptc.2012.6507155 ◽

2012 ◽

Author(s):

Pierre-Yves Guittet ◽

D. Shivaprasad ◽

L. Markwort ◽

G. Savage ◽

C. Kappel ◽

...

Keyword(s):

High Throughput ◽

Inspection System ◽

Defect Inspection ◽

3D Ic ◽

3D Ic Packaging ◽

Ic Packaging ◽

Silicon Thickness

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Introduction of a high throughput SPM for defect inspection and process control

10.1117/12.2019389 ◽

2013 ◽

Cited By ~ 16

Author(s):

H. Sadeghian ◽

N. B. Koster ◽

T. C. van den Dool

Keyword(s):

Process Control ◽

High Throughput ◽

Defect Inspection

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High Throughput Screening Methods

10.1039/9781782626770 ◽

2016 ◽

Cited By ~ 4

Keyword(s):

High Throughput ◽

High Throughput Screening ◽

Screening Methods

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154: Integration of TPSA and High-Throughput Mass Spectrometry Data Improves Prostate Cancer Prediction

The Journal of Urology ◽

10.1016/s0022-5347(18)30419-1 ◽

2007 ◽

Vol 177 (4S) ◽

pp. 52-53

Author(s):

Stefano Ongarello ◽

Eberhard Steiner ◽

Regina Achleitner ◽

Isabel Feuerstein ◽

Birgit Stenzel ◽

...

Keyword(s):

Prostate Cancer ◽

Mass Spectrometry ◽

High Throughput ◽

Mass Spectrometry Data ◽

Cancer Prediction

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461: Increasing the Predictive Ability of Clinico-pathologic Markers for Prostate Cancer using Biomarkers Derived from High-Throughput Tissue Micorarray Studies in a Large Retrospective Cohort: A Stratification Strategy

The Journal of Urology ◽

10.1016/s0022-5347(18)34714-1 ◽

2005 ◽

Vol 173 (4S) ◽

pp. 126-126

Author(s):

Gustavo Ayala ◽

R. Li ◽

A. Frolov ◽

Michael Ittmann ◽

Hong Dai ◽

...

Keyword(s):

Prostate Cancer ◽

High Throughput ◽

Retrospective Cohort ◽

Predictive Ability

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Immunohistochemical features of early breast cancer in young women; a translational research project using high-throughput tissue microarray technology

European Journal of Cancer ◽

10.1016/s0959-8049(02)80347-1 ◽

2002 ◽

Vol 38 (11) ◽

pp. S108

Author(s):

J Van der Hage

Keyword(s):

Breast Cancer ◽

Translational Research ◽

Tissue Microarray ◽

Early Breast Cancer ◽

High Throughput ◽

Young Women ◽

Microarray Technology ◽

Research Project

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Automated High-Throughput Purification of PCR Products Using Wizard®MagneSil™ Paramagnetic Particles

JALA Journal of the Association for Laboratory Automation ◽

10.1016/s1535-5535(04)00232-1 ◽

2002 ◽

Vol 7 (6) ◽

pp. 120-124

Author(s):

P Otto

Keyword(s):

High Throughput ◽

Pcr Products

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Review for "High‐throughput single‐cell sequencing of paired TCRα and TCRβ genes for the direct expression‐cloning and functional analysis of murine T cell receptors"

10.1002/eji.201848030/v1/review1 ◽

2019 ◽

Keyword(s):

Functional Analysis ◽

T Cell ◽

Single Cell ◽

High Throughput ◽

T Cell Receptors ◽

Expression Cloning ◽

Cell Receptors ◽

Single Cell Sequencing

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