Dual ion beam sputtering deposition of silicon oxynitride thin films

Mapping Intimacies ◽

10.1117/12.246825 ◽

1996 ◽

Cited By ~ 2

Author(s):

Francesca Sarto ◽

Antonella Rizzo ◽

Rossella Giorgi ◽

S. Turtu ◽

Salvatore Scaglione

Keyword(s):

Thin Films ◽

Ion Beam ◽

Silicon Oxynitride ◽

Ion Beam Sputtering ◽

Sputtering Deposition ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering

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Room temperature synthesis of boron nitride thin films by dual-ion beam sputtering deposition

Ceramics International ◽

10.1016/j.ceramint.2015.11.090 ◽

2016 ◽

Vol 42 (3) ◽

pp. 4171-4175 ◽

Cited By ~ 1

Author(s):

Z.F. Wu ◽

L. Guo ◽

K. Cheng ◽

F. Zhang ◽

R.F. Guan

Keyword(s):

Thin Films ◽

Boron Nitride ◽

Room Temperature ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Temperature Synthesis ◽

Sputtering Deposition ◽

Room Temperature Synthesis ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering

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Room-Temperature Growth of SiC Thin Films by Dual-Ion-Beam Sputtering Deposition

Physical Chemistry - Research Progress in Chemistry ◽

10.1201/b12875-28 ◽

2011 ◽

pp. 322-332

Author(s):

C Jin ◽

X Wu ◽

L Zhuge

Keyword(s):

Thin Films ◽

Room Temperature ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Temperature Growth ◽

Sputtering Deposition ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering

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Optimization of dielectric films with dual ion beam sputtering deposition for high reflectivity mirrors

Materials Today Proceedings ◽

10.1016/j.matpr.2020.11.686 ◽

2021 ◽

Author(s):

Laxminarayana Gangalakurti ◽

K. Venugopal Reddy ◽

I.M. Chhabra

Keyword(s):

Ion Beam ◽

Dielectric Films ◽

Ion Beam Sputtering ◽

Sputtering Deposition ◽

High Reflectivity ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering

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Formation of the crystalline β-C3N4 phase by dual ion beam sputtering deposition

Materials Letters ◽

10.1016/j.matlet.2007.03.049 ◽

2007 ◽

Vol 61 (14-15) ◽

pp. 2855-2858 ◽

Cited By ~ 5

Author(s):

J.P. Rivière ◽

D. Texier ◽

J. Delafond ◽

M. Jaouen ◽

E.L. Mathé ◽

...

Keyword(s):

Ion Beam ◽

Ion Beam Sputtering ◽

Sputtering Deposition ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering

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Ultra-low stress high reflective film by dual-ion-beam sputtering deposition

Optical Engineering ◽

10.1117/1.oe.61.3.031203 ◽

2021 ◽

Vol 61 (03) ◽

Author(s):

Jinlin Bai ◽

Huasong Liu ◽

Yugang Jiang ◽

Lishuan Wang ◽

Xiao Yang ◽

...

Keyword(s):

Ion Beam ◽

Ion Beam Sputtering ◽

Sputtering Deposition ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering

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Growth of Thin Films by UHV ION Beam Sputtering Deposition Technique

Erosion and Growth of Solids Stimulated by Atom and Ion Beams ◽

10.1007/978-94-009-4422-0_30 ◽

1986 ◽

pp. 457-460 ◽

Cited By ~ 1

Author(s):

C. Pellet ◽

C. Schwebel ◽

F. Meyer ◽

G. Gautherin

Keyword(s):

Thin Films ◽

Ion Beam ◽

Deposition Technique ◽

Ion Beam Sputtering ◽

Sputtering Deposition ◽

Beam Sputtering

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Interdependence between stress, preferred orientation, and surface morphology of nanocrystalline TiN thin films deposited by dual ion beam sputtering

Journal of Applied Physics ◽

10.1063/1.2197287 ◽

2006 ◽

Vol 99 (11) ◽

pp. 113519 ◽

Cited By ~ 90

Author(s):

G. Abadias ◽

Y. Y. Tse ◽

Ph. Guérin ◽

V. Pelosin

Keyword(s):

Thin Films ◽

Surface Morphology ◽

Ion Beam ◽

Preferred Orientation ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Tin Thin Films ◽

Dual Ion Beam Sputtering

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Epitaxial growth of MgO thin films on silicon by dual ion beam sputtering

Thin Solid Films ◽

10.1016/0040-6090(93)90720-a ◽

1993 ◽

Vol 223 (1) ◽

pp. 11-13 ◽

Cited By ~ 13

Author(s):

Yijie Li ◽

Guangcheng Xiong ◽

Guijun Lian ◽

Jie Li ◽

Zizhao Gan

Keyword(s):

Thin Films ◽

Epitaxial Growth ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering

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Effect of assist ion beam voltage on intrinsic stress and optical properties of Ta2O5 thin films deposited by dual ion beam sputtering

Thin Solid Films ◽

10.1016/j.tsf.2007.08.051 ◽

2008 ◽

Vol 516 (11) ◽

pp. 3582-3585 ◽

Cited By ~ 4

Author(s):

S.G. Yoon ◽

S.M. Kang ◽

W.S. Jung ◽

S.-W. Kim ◽

D.H. Yoon

Keyword(s):

Thin Films ◽

Optical Properties ◽

Ion Beam ◽

Intrinsic Stress ◽

Ion Beam Sputtering ◽

Beam Voltage ◽

Beam Sputtering ◽

Dual Ion Beam Sputtering

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Ion-beam sputtering deposition of CsI thin films

Applied Physics A ◽

10.1007/s00339-004-3097-9 ◽

2004 ◽

Vol 80 (8) ◽

pp. 1789-1791 ◽

Cited By ~ 11

Author(s):

M.A. Nitti ◽

A. Valentini ◽

G.S. Senesi ◽

G. Ventruti ◽

E. Nappi ◽

...

Keyword(s):

Thin Films ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Sputtering Deposition ◽

Beam Sputtering

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