Interdependence between stress, preferred orientation, and surface morphology of nanocrystalline TiN thin films deposited by dual ion beam sputtering

2006 ◽  
Vol 99 (11) ◽  
pp. 113519 ◽  
Author(s):  
G. Abadias ◽  
Y. Y. Tse ◽  
Ph. Guérin ◽  
V. Pelosin
Keyword(s):  
Thin Films ◽  
Surface Morphology ◽  
Ion Beam ◽  
Preferred Orientation ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Tin Thin Films ◽  
Dual Ion Beam Sputtering

Epitaxial growth of MgO thin films on silicon by dual ion beam sputtering

1993 ◽  
Vol 223 (1) ◽  
pp. 11-13 ◽  
Author(s):  
Yijie Li ◽  
Guangcheng Xiong ◽  
Guijun Lian ◽  
Jie Li ◽  
Zizhao Gan
Keyword(s):  
Thin Films ◽  
Epitaxial Growth ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

Hard BCxNy thin films grown by dual ion beam sputtering

2006 ◽  
Vol 515 (1) ◽  
pp. 207-211 ◽  
Author(s):  
C. Morant ◽  
P. Prieto ◽  
J. Bareño ◽  
J.M. Sanz ◽  
E. Elizalde
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

Processing of La1.8Sr0.2CuO4and YBa2Cu3O7superconducting thin films by dual‐ion‐beam sputtering

1988 ◽  
Vol 63 (6) ◽  
pp. 2046-2053 ◽  
Author(s):  
P. Madakson ◽  
J. J. Cuomo ◽  
D. S. Yee ◽  
R. A. Roy ◽  
G. Scilla
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

Mechanical and thermoelastic characteristics of optical thin films deposited by dual ion beam sputtering

2009 ◽  
Vol 48 (23) ◽  
pp. 4536 ◽  
Author(s):  
Eda Çetinörgü ◽  
Bill Baloukas ◽  
Oleg Zabeida ◽  
Jolanta E. Klemberg-Sapieha ◽  
Ludvik Martinu
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Thermoelastic Characteristics ◽  
Dual Ion Beam Sputtering

TfC16. Growth of perovksite PLZT thin films by dual ion beam sputtering

1992 ◽  
Vol 134 (1) ◽  
pp. 297-302 ◽  
Author(s):  
D. A. Tossell ◽  
N. M. Shorrocks ◽  
J. S. Obhi ◽  
R. W. Whatmore
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Plzt Thin Films ◽  
Dual Ion Beam Sputtering
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