Low-temperature atomic layer deposition of aluminum oxide scaled up to a 36" chamber for observatory optics

2018 ◽  
Author(s):  
David M. Fryauf ◽  
Andrew C. Phillips ◽  
Michael J. Bolte ◽  
Nobuhiko P. Kobayashi ◽  
Gary S. Tompa ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Atomic Layer ◽  
Layer Deposition

Testing low-temperature atomic layer deposition of aluminum oxide in a 36” chamber

2018 ◽  
Author(s):  
David Fryauf ◽  
Andrew C. Phillips ◽  
Nobuhiko Kobayashi ◽  
Michael J. Bolte ◽  
Aaron Feldman ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Atomic Layer ◽  
Layer Deposition

Low-temperature growth of ZnO nanorods in anodic aluminum oxide on Si substrate by atomic layer deposition

2007 ◽  
Vol 90 (3) ◽  
pp. 033104 ◽  
Author(s):  
Ching-Jung Yang ◽  
Shun-Min Wang ◽  
Shih-Wei Liang ◽  
Yung-Huang Chang ◽  
Chih Chen ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Zno Nanorods ◽  
Atomic Layer ◽  
Si Substrate ◽  
Temperature Growth ◽  
Anodic Aluminum ◽  
Layer Deposition
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