Effect of oxygen flux on stress and optical properties of Ta2O5 using ion-beam sputtering

2017 ◽  
Author(s):  
Qi Yu ◽  
Jun-qi Fan ◽  
Chun-lin Guan
Keyword(s):  
Optical Properties ◽  
Ion Beam ◽  
Oxygen Flux ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Effect Of Oxygen

Aging effect of optical properties on SiO2films grown on Si substrates by ion beam sputtering

2012 ◽  
Author(s):  
Yiqin Ji ◽  
Huasong Liu ◽  
Yugang Jiang ◽  
Dandan Liu ◽  
Lishuan Wang ◽  
...  
Keyword(s):  
Optical Properties ◽  
Ion Beam ◽  
Aging Effect ◽  
Ion Beam Sputtering ◽  
Si Substrates ◽  
Beam Sputtering

Effect of Thickness Affecting Optical Properties of Ge Thin Film Preparing by Ultra Vacuum Ion Beam Sputtering

2010 ◽  
Vol 57 (5B) ◽  
pp. 1197-1199 ◽  
Author(s):  
Yen-Hsun Su ◽  
Sheng-Lung Tu ◽  
Ho-Tung Lin ◽  
Chun-Chieh Huang
Keyword(s):  
Thin Film ◽  
Optical Properties ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

Optical properties of dense thin‐film Si and Ge prepared by ion‐beam sputtering

1985 ◽  
Vol 58 (2) ◽  
pp. 954-957 ◽  
Author(s):  
R. W. Collins ◽  
H. Windischmann ◽  
J. M. Cavese ◽  
J. Gonzalez‐Hernandez
Keyword(s):  
Thin Film ◽  
Optical Properties ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

Optical Properties of TiO^2-SiO^2 Mixture Thin Films Produced by Ion-Beam Sputtering

2007 ◽  
Author(s):  
Tatiana V. Amotchkina ◽  
Detlev Ristau ◽  
Marc Lappschies ◽  
Marco Jupe ◽  
Alexander V. Tikhonravov ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering
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