Global minimization line-edge roughness analysis of top down SEM images

Mapping Intimacies ◽

10.1117/12.2258035 ◽

2017 ◽

Cited By ~ 3

Author(s):

Barton Lane ◽

Chris Mack ◽

Nasim Eibagi ◽

Peter Ventzek

Keyword(s):

Global Minimization ◽

Line Edge Roughness ◽

Top Down ◽

Sem Images ◽

Edge Roughness ◽

Roughness Analysis

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Root-cause decomposition of line edge roughness and its application to cross-section profile prediction using top-view SEM images

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.4827187 ◽

2013 ◽

Vol 31 (6) ◽

pp. 06F802

Author(s):

Hiroshi Fukuda

Keyword(s):

Cross Section ◽

Line Edge Roughness ◽

Sem Images ◽

Root Cause ◽

Edge Roughness ◽

Section Profile ◽

Cross Section Profile ◽

Top View

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Practical approach to modeling e-beam lithographic process from SEM images for minimization of line edge roughness and critical dimension error

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.4937740 ◽

2016 ◽

Vol 34 (1) ◽

pp. 011601 ◽

Cited By ~ 3

Author(s):

Rui Guo ◽

Soo-Young Lee ◽

Jin Choi ◽

Sung-Hoon Park ◽

In-Kyun Shin ◽

...

Keyword(s):

Critical Dimension ◽

Practical Approach ◽

Line Edge Roughness ◽

Sem Images ◽

Edge Roughness

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Determination of line edge roughness in low-dose top-down scanning electron microscopy images

Journal of Micro/Nanolithography MEMS and MOEMS ◽

10.1117/1.jmm.13.3.033009 ◽

2014 ◽

Vol 13 (3) ◽

pp. 033009 ◽

Cited By ~ 23

Author(s):

Thomas Verduin ◽

Pieter Kruit ◽

Cornelis W. Hagen

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Low Dose ◽

Line Edge Roughness ◽

Top Down ◽

Edge Roughness ◽

Microscopy Images ◽

Scanning Electron

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Cross-sectional profile prediction from top-view SEM images based on root-cause decomposition of line-edge roughness

10.1117/12.2045457 ◽

2014 ◽

Author(s):

Hiroshi Fukuda

Keyword(s):

Line Edge Roughness ◽

Sem Images ◽

Cross Sectional ◽

Root Cause ◽

Edge Roughness ◽

Cross Sectional Profile ◽

Sectional Profile ◽

Top View

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Photoresist line-edge roughness analysis using scaling concepts

Journal of Micro/Nanolithography MEMS and MOEMS ◽

10.1117/1.1759325 ◽

2004 ◽

Vol 3 (3) ◽

pp. 429 ◽

Cited By ~ 24

Author(s):

Vassilios Constantoudis

Keyword(s):

Line Edge Roughness ◽

Edge Roughness ◽

Roughness Analysis

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Photoresist line-edge roughness analysis using scaling concepts

10.1117/12.482809 ◽

2003 ◽

Cited By ~ 9

Author(s):

Vasilios Constantoudis ◽

George P. Patsis ◽

Evangelos Gogolides

Keyword(s):

Line Edge Roughness ◽

Edge Roughness ◽

Roughness Analysis

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Noise filtering for accurate measurement of line edge roughness and critical dimension from SEM images

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.4968184 ◽

2016 ◽

Vol 34 (6) ◽

pp. 06K604 ◽

Cited By ~ 1

Author(s):

Dehua Li ◽

Rui Guo ◽

Soo-Young Lee ◽

Jin Choi ◽

Seom-Beom Kim ◽

...

Keyword(s):

Critical Dimension ◽

Noise Filtering ◽

Line Edge Roughness ◽

Sem Images ◽

Edge Roughness

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Line-edge roughness estimation in SEM images of lithographic nanostructures

Acta Crystallographica Section A Foundations of Crystallography ◽

10.1107/s0108767312095281 ◽

2012 ◽

Vol 68 (a1) ◽

pp. s243-s243

Author(s):

K. Bojar

Keyword(s):

Line Edge Roughness ◽

Sem Images ◽

Edge Roughness

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The effect of sidewall roughness on line edge roughness in top-down scanning electron microscopy images

10.1117/12.2085768 ◽

2015 ◽

Cited By ~ 1

Author(s):

T. Verduin ◽

S. R. Lokhorst ◽

P. Kruit ◽

C. W. Hagen

Keyword(s):

Electron Microscopy ◽

Scanning Electron Microscopy ◽

Line Edge Roughness ◽

Top Down ◽

Sidewall Roughness ◽

Edge Roughness ◽

On Line ◽

Microscopy Images ◽

Scanning Electron

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Line edge roughness measurement through SEM images: effects of image digitization and their mitigation

33rd European Mask and Lithography Conference ◽

10.1117/12.2294060 ◽

2017 ◽

Cited By ~ 4

Author(s):

George Papavieros ◽

Vassilios Constantoudis

Keyword(s):

Line Edge Roughness ◽

Roughness Measurement ◽

Sem Images ◽

Edge Roughness ◽

Image Digitization

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