Laser-induced damage of F-SiO2 protected fluoride-based AR coatings on subsurface-damage-free CaF2 at 193 nm
Keyword(s):
Keyword(s):
2013 ◽
Vol 40
(7)
◽
pp. 0707001
◽
1991 ◽
Vol 49
◽
pp. 632-633