Laser-induced damage in pellicles at 193 nm

1993 ◽  
Vol 32 (10) ◽  
pp. 2421 ◽  
Author(s):  
Mordechai Rothschild
Keyword(s):  
Laser Induced Damage ◽  
193 Nm

Laser-induced damage of F-SiO2 protected fluoride-based AR coatings on subsurface-damage-free CaF2 at 193 nm

2016 ◽  
Author(s):  
Jue Wang ◽  
Gerald P. Cox ◽  
Michael J. D'Lallo ◽  
Steven Vankerkhove ◽  
Jean Francois Oudard
Keyword(s):  
Subsurface Damage ◽  
Laser Induced Damage ◽  
193 Nm

Laser-induced damage in pellicles at 193 nm

1992 ◽  
Author(s):  
Mordechai Rothschild ◽  
Jan H. C. Sedlacek
Keyword(s):  
Laser Induced Damage ◽  
193 Nm

Critical issues on the assessment of laser-induced damage thresholds of fluoride multilayer coatings at 193 nm

2000 ◽  
Author(s):  
Roland Thielsch ◽  
Joerg Heber ◽  
Norbert Kaiser ◽  
Sven Martin ◽  
Eberhard Welsch
Keyword(s):  
Multilayer Coatings ◽  
Critical Issues ◽  
Laser Induced Damage ◽  
193 Nm

Laser Induced Damage of Fluoride Coatings at 193 nm

2013 ◽  
Vol 40 (7) ◽  
pp. 0707001 ◽  
Author(s):  
常艳贺 Chang Yanhe ◽  
金春水 Jin Chunshui ◽  
李春 Li Chun ◽  
靳京城 Jin Jingcheng
Keyword(s):  
Laser Induced Damage ◽  
193 Nm

UHV-TEM studies of laser-induced damage

1991 ◽  
Vol 49 ◽  
pp. 632-633
Author(s):  
T.S. Savage ◽  
R. Ai ◽  
D. Dunn ◽  
L.D. Marks
Keyword(s):  
Surface Science ◽  
Rapid Heating ◽  
Local Heating ◽  
Routine Practice ◽  
Transmission Electron ◽  
Northwestern University ◽  
Laser Induced Damage ◽  
Set Up ◽  
Focusing Lens ◽  
Diffusion Of Impurities

The use of lasers for surface annealing, heating and/or damage has become a routine practice in the study of materials. Lasers have been closely looked at as an annealing technique for silicon and other semiconductors. They allow for local heating from a beam which can be focused and tuned to different wavelengths for specific tasks. Pulsed dye lasers allow for short, quick bursts which can allow the sample to be rapidly heated and quenched. This short, rapid heating period may be important for cases where diffusion of impurities or dopants may not be desirable.At Northwestern University, a Candela SLL - 250 pulsed dye laser, with a maximum power of 1 Joule/pulse over 350 - 400 nanoseconds, has been set up in conjunction with a Hitachi UHV-H9000 transmission electron microscope. The laser beam is introduced into the surface science chamber through a series of mirrors, a focusing lens and a six inch quartz window.

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