Carbon and fluorine co-implantation for boron diffusion suppression in extremely ultra shallow junctions

2014 ◽  
Author(s):  
Andrey V. Miakonkikh ◽  
Aleksander E. Rogozhin ◽  
Valeriy I. Rudakov ◽  
Konstantin V. Rudenko ◽  
Vladimir F. Lukichev
Keyword(s):  
Boron Diffusion ◽  
Shallow Junctions ◽  
Ultra Shallow Junctions

Formation of Ultra-Shallow Junctions by Advanced Plasma Doping Techniques

2011 ◽  
Author(s):  
G. D. Papasouliotis ◽  
L. Godet ◽  
V. Singh ◽  
R. Miura ◽  
H. Ito ◽  
...  
Keyword(s):  
Plasma Doping ◽  
Shallow Junctions ◽  
Ultra Shallow Junctions

Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth

2004 ◽  
Vol 22 (1) ◽  
pp. 306 ◽  
Author(s):  
R. Lindsay ◽  
K. Henson ◽  
W. Vandervorst ◽  
K. Maex ◽  
B. J. Pawlak ◽  
...  
Keyword(s):  
Solid Phase ◽  
Epitaxial Regrowth ◽  
Shallow Junctions ◽  
Ultra Shallow Junctions

Photoluminescence Characterization of Defects in Rapidly Annealed Ultra Shallow Junctions

2013 ◽  
Vol 2 (5) ◽  
pp. P195-P204 ◽  
Author(s):  
Masahiro Yoshimoto ◽  
Masashi Okutani ◽  
Gota Murai ◽  
Shuji Tagawa ◽  
Hiroki Saikusa ◽  
...  
Keyword(s):  
Shallow Junctions ◽  
Ultra Shallow Junctions

Defects in Ultra-Shallow Junctions

2008 ◽  
Author(s):  
Mark Law ◽  
Renata Camillo-Castillo ◽  
Lance Robertson ◽  
Kevin Jones
Keyword(s):  
Shallow Junctions ◽  
Ultra Shallow Junctions

Ultra-Shallow junctions in silicon using amorphous and polycrystalline silicon solid diffusion sources

1991 ◽  
Vol 20 (3) ◽  
pp. 261-265 ◽  
Author(s):  
Keunhyung Park ◽  
Shubneesh Batra ◽  
Sanjay Banerjee ◽  
Gayle Lux
Keyword(s):  
Polycrystalline Silicon ◽  
Solid Diffusion ◽  
Shallow Junctions ◽  
Ultra Shallow Junctions
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