Defects in Microelectronic Materials and Devices
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Hydrogen-Related Defects in Silicon, Germanium, and Silicon–Germanium Alloys

Defects in Microelectronic Materials and Devices ◽

10.1201/9781420043778-6 ◽

2008 ◽

pp. 43-72

Keyword(s):

Silicon Germanium ◽

Silicon Germanium Alloys

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Defects in Ultra-Shallow Junctions

Defects in Microelectronic Materials and Devices ◽

10.1201/9781420043778-5 ◽

2008 ◽

pp. 17-42

Keyword(s):

Shallow Junctions ◽

Ultra Shallow Junctions

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Defects in SiC

Defects in Microelectronic Materials and Devices ◽

10.1201/9781420043778-25 ◽

2008 ◽

pp. 631-686

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Defects in Thin and Ultrathin Silicon Dioxides

Defects in Microelectronic Materials and Devices ◽

10.1201/9781420043778-21 ◽

2008 ◽

pp. 513-548

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Defects in CMOS Gate Dielectrics

Defects in Microelectronic Materials and Devices ◽

10.1201/9781420043778-15 ◽

2008 ◽

pp. 357-374

Keyword(s):

Gate Dielectrics

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Structural Defects in SiO2–Si Caused by Ion Bombardment

Defects in Microelectronic Materials and Devices ◽

10.1201/9781420043778-22 ◽

2008 ◽

pp. 549-566

Keyword(s):

Ion Bombardment ◽

Structural Defects

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Toward Engineering Modeling of Negative Bias Temperature Instability

Defects in Microelectronic Materials and Devices ◽

10.1201/9781420043778-18 ◽

2008 ◽

pp. 415-452

Keyword(s):

Negative Bias ◽

Negative Bias Temperature Instability ◽

Temperature Instability ◽

Bias Temperature Instability ◽

Engineering Modeling

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Defect Formation and Annihilation in Electronic Devices and the Role of Hydrogen

Defects in Microelectronic Materials and Devices ◽

10.1201/9781420043778-17 ◽

2008 ◽

pp. 397-414

Keyword(s):

Defect Formation ◽

Electronic Devices

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Negative Bias Temperature Instabilites in High-k Gate Dielectrics

Defects in Microelectronic Materials and Devices ◽

10.1201/9781420043778-16 ◽

2008 ◽

pp. 375-396

Keyword(s):

Gate Dielectrics ◽

Negative Bias ◽

High K

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Spectroscopic Studies of Electrically Active Defects in High-K Gate Dielectrics

Defects in Microelectronic Materials and Devices ◽

10.1201/9781420043778-14 ◽

2008 ◽

pp. 321-356

Keyword(s):

Gate Dielectrics ◽

Spectroscopic Studies ◽

High K

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Defects in Microelectronic Materials and DevicesLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By CRC Press

Hydrogen-Related Defects in Silicon, Germanium, and Silicon–Germanium Alloys

Defects in Ultra-Shallow Junctions

Defects in SiC

Defects in Thin and Ultrathin Silicon Dioxides

Defects in CMOS Gate Dielectrics

Structural Defects in SiO2–Si Caused by Ion Bombardment

Toward Engineering Modeling of Negative Bias Temperature Instability

Defect Formation and Annihilation in Electronic Devices and the Role of Hydrogen

Negative Bias Temperature Instabilites in High-k Gate Dielectrics

Spectroscopic Studies of Electrically Active Defects in High-K Gate Dielectrics

Defects in Microelectronic Materials and Devices
Latest Publications