Quantitative measures for surface texture description in semiconductor wafer inspection

1990 ◽  
Author(s):  
A. Ravishankar Rao ◽  
Ramesh C. Jain
Keyword(s):  
Surface Texture ◽  
Semiconductor Wafer ◽  
Wafer Inspection

Machine vision algorithms for semiconductor wafer inspection: a project with Inspex

1998 ◽  
Author(s):  
Chi Hau Chen ◽  
Tzu-Hung Cheng ◽  
Wo-Tak Wu ◽  
Shawn Driscoll
Keyword(s):  
Machine Vision ◽  
Semiconductor Wafer ◽  
Wafer Inspection

scholarly journals Tracking and Synchronization with Inversion-Based ILC for a Multi-Actuator-Driven Wafer Inspection Cartridge Transport Robot System

Electronics ◽  
2021 ◽  
Vol 10 (23) ◽  
pp. 2904
Author(s):  
Dong Jun Oh ◽  
Seung Guk Baek ◽  
Kyung-Tae Nam ◽  
Ja Choon Koo
Keyword(s):  
Iterative Learning Control ◽  
Control Method ◽  
Iterative Learning ◽  
Synchronization Control ◽  
System Control ◽  
Input Output ◽  
Semiconductor Wafer ◽  
Robot System ◽  
Output Data ◽  
Wafer Inspection

This paper proposes a simple tracking and synchronization control of a dual-drive system using inversion-based iterative learning control (IILC), which reformulates the model at each iteration based on input/output data. By the power of the IILC, this work simplifies the dual-actuator-driven dynamic system control problem that is normally addressed with a MIMO method. This work also shows the potential of the IILC for nonlinear system applications by reformulating the model at each iteration based on the input/output data. An analytical representation of the iteration-varying IILC followed by simulations is provided. A set of physical system testings with a dual-motor gantry and a semiconductor wafer inspection robotic system are carried out to verify the control method.

scholarly journals Improving Semiconductor Wafer Inspection

2020 ◽  
Vol 17 (6) ◽  
pp. 57-59
Author(s):  
Siva Hemanth Valluru
Keyword(s):  
Semiconductor Wafer ◽  
Wafer Inspection

Machine Vision for Semiconductor Wafer Inspection

1989 ◽  
pp. 283-314 ◽  
Author(s):  
Ramesh Jain ◽  
A. Ravishankar Rao ◽  
Ali Kayaalp ◽  
Charles Cole
Keyword(s):  
Machine Vision ◽  
Semiconductor Wafer ◽  
Wafer Inspection
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