scholarly journals Improving Semiconductor Wafer Inspection

2020 ◽  
Vol 17 (6) ◽  
pp. 57-59
Author(s):  
Siva Hemanth Valluru
Keyword(s):  
Semiconductor Wafer ◽  
Wafer Inspection

Machine vision algorithms for semiconductor wafer inspection: a project with Inspex

1998 ◽  
Author(s):  
Chi Hau Chen ◽  
Tzu-Hung Cheng ◽  
Wo-Tak Wu ◽  
Shawn Driscoll
Keyword(s):  
Machine Vision ◽  
Semiconductor Wafer ◽  
Wafer Inspection

scholarly journals Tracking and Synchronization with Inversion-Based ILC for a Multi-Actuator-Driven Wafer Inspection Cartridge Transport Robot System

Electronics ◽  
2021 ◽  
Vol 10 (23) ◽  
pp. 2904
Author(s):  
Dong Jun Oh ◽  
Seung Guk Baek ◽  
Kyung-Tae Nam ◽  
Ja Choon Koo
Keyword(s):  
Iterative Learning Control ◽  
Control Method ◽  
Iterative Learning ◽  
Synchronization Control ◽  
System Control ◽  
Input Output ◽  
Semiconductor Wafer ◽  
Robot System ◽  
Output Data ◽  
Wafer Inspection

This paper proposes a simple tracking and synchronization control of a dual-drive system using inversion-based iterative learning control (IILC), which reformulates the model at each iteration based on input/output data. By the power of the IILC, this work simplifies the dual-actuator-driven dynamic system control problem that is normally addressed with a MIMO method. This work also shows the potential of the IILC for nonlinear system applications by reformulating the model at each iteration based on the input/output data. An analytical representation of the iteration-varying IILC followed by simulations is provided. A set of physical system testings with a dual-motor gantry and a semiconductor wafer inspection robotic system are carried out to verify the control method.

Machine Vision for Semiconductor Wafer Inspection

1989 ◽  
pp. 283-314 ◽  
Author(s):  
Ramesh Jain ◽  
A. Ravishankar Rao ◽  
Ali Kayaalp ◽  
Charles Cole
Keyword(s):  
Machine Vision ◽  
Semiconductor Wafer ◽  
Wafer Inspection

scholarly journals Movement Control Method of Magnetic Levitation System Using Eccentricity of Non-Contact Position Sensor

2021 ◽  
Vol 11 (5) ◽  
pp. 2396
Author(s):  
Jong Suk Lim ◽  
Hyung-Woo Lee
Keyword(s):  
Motor System ◽  
Control Method ◽  
Magnetic Levitation ◽  
Movement Control ◽  
Position Sensor ◽  
Semiconductor Wafer ◽  
Control Command ◽  
Levitation System ◽  
Magnetic Levitation System ◽  
Contact Position

This paper presents a method of utilizing a non-contact position sensor for the tilting and movement control of a rotor in a rotary magnetic levitation motor system. This system has been studied with the aim of having a relatively simple and highly clean alternative application compared to the spin coater used in the photoresist coating process in the semiconductor wafer process. To eliminate system wear and dust problems, a shaft-and-bearing-free magnetic levitation motor system was designed and a minimal non-contact position sensor was placed. An algorithm capable of preventing derailment and precise movement control by applying only control without additional mechanical devices to this magnetic levitation system was proposed. The proposed algorithm was verified through simulations and experiments, and the validity of the algorithm was verified by deriving a precision control result suitable for the movement control command in units of 0.1 mm at 50 rpm rotation drive.

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