Excimer laser technology for soft x-ray generation

1994 ◽  
Author(s):  
Michael F. Powers ◽  
Harry Shields
Keyword(s):  
Excimer Laser ◽  
Laser Technology ◽  
X Ray

Heterostructures of GaAs and AlAs on Silicon: X-Ray Analysis and Excimer Laser Annealing

1988 ◽  
Vol 116 ◽  
Author(s):  
A. Georgakilas ◽  
M. Fatemi ◽  
L. Fotiadis ◽  
A. Christou
Keyword(s):  
Molecular Beam Epitaxy ◽  
Dislocation Density ◽  
Excimer Laser ◽  
Molecular Beam ◽  
Laser Annealing ◽  
High Resistivity ◽  
Silicon Substrates ◽  
Excimer Laser Annealing ◽  
X Ray ◽  
High Resistivity Silicon

AbstractOne micron thick AlAs/GaAs structures have been deposited by molecular beam epitaxy onto high resistivity silicon substrates. Subsequent to deposition, it is shown that Excimer laser annealing up to 120mJ/cm2 at 248nm improves the GaAs mobility to approximately 2000cm2 /v-s. Dislocation density, however, did not decrease up to 180mJ/cm2 showing that improvement in transport properties may not be accompanied by an associated decrease in dislocation density at the GaAs/Si interface.

scholarly journals Evaluation of LB Films for Excimer Laser and X-ray Resists

1988 ◽  
Vol 42 (1) ◽  
pp. 56-62_1
Author(s):  
Kazufumi Ogawa ◽  
Hideharu Tamura
Keyword(s):  
Excimer Laser ◽  
Lb Films ◽  
X Ray

10 x 10 cm2 aperture x-ray preionized discharge-pumped KrF excimer laser

1990 ◽  
Author(s):  
Hakaru Mizoguchi ◽  
Akira Endo ◽  
Jayden N. Jethwa ◽  
Fritz P. Schaefer
Keyword(s):  
Excimer Laser ◽  
X Ray ◽  
Krf Excimer Laser

ENHANCING HIGH-TEMPERATURE OXIDATION RESISTANCE OF TITANIUM ALLOY WITH KF110-B4C-Ag THROUGH LASER TECHNOLOGY

2021 ◽  
Author(s):  
ZHAO ZHANG ◽  
JIANING LI ◽  
ZHIYUN YE ◽  
CAINIAN JING ◽  
MENG WANG ◽  
...  
Keyword(s):  
Titanium Alloy ◽  
High Temperature ◽  
Oxidation Resistance ◽  
High Temperature Oxidation ◽  
Mass Gain ◽  
Temperature Oxidation ◽  
Laser Technology ◽  
X Ray ◽  
Ta15 Titanium Alloy ◽  
Oxidation Resistant

In this paper, the high-temperature oxidation resistant coating on the TA15 titanium alloy by laser cladding (LC) of the KF110-B4C-Ag mixed powders was analyzed in detail. The scanning electron microscope (SEM) and energy dispersive X-ray spectrometer (EDS) images indicated that a good metallurgy bond between the fabricated coating/TA15 was formed; also the fine/compact microstructure was produced after a cladding process. The oxidation mass gain of TA15 was higher than that of the coating after LC process, which were 3.72 and 0.91[Formula: see text]mg[Formula: see text]cm[Formula: see text], respectively, at 60[Formula: see text]h, greatly enhancing the high temperature oxidation resistance.

The masks fabricated by UV LIGA for excimer laser ablation and x-ray lithography

2004 ◽  
Author(s):  
Jingqiu Liang ◽  
Zichun Le ◽  
Weibiao Wang ◽  
Liangqiang Peng ◽  
Weihua Lan ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Excimer Laser ◽  
X Ray ◽  
Excimer Laser Ablation

Efficient keV x‐ray emission from plasmas generated with 4 ps KrF excimer laser pulses

1993 ◽  
Vol 63 (22) ◽  
pp. 3046-3048 ◽  
Author(s):  
I. C. E. Turcu ◽  
I. N. Ross ◽  
G. J. Tallents
Keyword(s):  
Excimer Laser ◽  
Laser Pulses ◽  
X Ray ◽  
Krf Excimer Laser
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