In situ spectral ellipsometry for real‐time thickness measurement: Etching multilayer stacks
1993 ◽
Vol 11
(4)
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pp. 1179-1185
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1995 ◽
Vol 157
(1-4)
◽
pp. 327-332
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Keyword(s):
1992 ◽
Vol 10
(4)
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pp. 934-938
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Keyword(s):
2017 ◽
Vol 2017
(4)
◽
pp. 5598-5617
Keyword(s):
2013 ◽
Vol 110
(6)
◽
pp. 1654-1662
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Keyword(s):