Impact of photoresist composition and polymer chain length on line edge roughness probed with a stochastic simulator

2007 ◽  
Vol 6 (4) ◽  
pp. 043005 ◽  
Author(s):  
Alexander Philippou
Keyword(s):  
Chain Length ◽  
Polymer Chain ◽  
Line Edge Roughness ◽  
Edge Roughness ◽  
On Line ◽  
Stochastic Simulator

Effect of Acid Diffusion and Polymer Structure on Line Edge Roughness

2007 ◽  
Vol 46 (9B) ◽  
pp. 6187-6190 ◽  
Author(s):  
Hiroki Yamamoto ◽  
Takahiro Kozawa ◽  
Akinori Saeki ◽  
Kazumasa Okamoto ◽  
Seiichi Tagawa ◽  
...  
Keyword(s):  
Polymer Structure ◽  
Line Edge Roughness ◽  
Acid Diffusion ◽  
Edge Roughness ◽  
On Line

Impact of Latent Image Quality on Line Edge Roughness in Electron Beam Lithography

2004 ◽  
Vol 43 (6B) ◽  
pp. 3739-3743 ◽  
Author(s):  
Masaki Yoshizawa ◽  
Shigeru Moriya ◽  
Hiroyuki Nakano ◽  
Yuichi Shirai ◽  
Tatsuo Morita ◽  
...  
Keyword(s):  
Electron Beam ◽  
Image Quality ◽  
Electron Beam Lithography ◽  
Line Edge Roughness ◽  
Latent Image ◽  
Edge Roughness ◽  
On Line
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