scholarly journals Nonoxidized Al-overcoated Ir bilayers with high reflectance in the extreme ultraviolet above 50 nm

2002 ◽  
Vol 41 (6) ◽  
pp. 1418 ◽  
Author(s):  
Juan I. Larruquert
Keyword(s):  
Extreme Ultraviolet ◽  
High Reflectance

High-reflectance coatings and materials for the extreme ultraviolet

1995 ◽  
Author(s):  
Ritva A. M. Keski-Kuha ◽  
John F. Osantowski ◽  
Gerry M. Blumenstock ◽  
Jeffrey S. Gum ◽  
Charles M. Fleetwood ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
High Reflectance

Photonic crystal films with high reflectance based on mesoporous silica in the extreme ultraviolet range

2020 ◽  
Vol 474 ◽  
pp. 126110
Author(s):  
Yuping Li ◽  
Ruonan Li ◽  
Huimin bian ◽  
Huijun Hu ◽  
Kai Zhang ◽  
...  
Keyword(s):  
Photonic Crystal ◽  
Mesoporous Silica ◽  
Extreme Ultraviolet ◽  
Ultraviolet Range ◽  
Crystal Films ◽  
High Reflectance

Sub-quarter-wave multilayer coatings with high reflectance in the extreme ultraviolet

2002 ◽  
Vol 41 (25) ◽  
pp. 5398 ◽  
Author(s):  
Juan I. Larruquert ◽  
Ritva A. M. Keski-Kuha
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coatings ◽  
Quarter Wave ◽  
High Reflectance

scholarly journals High reflectance ta-C coatings in the extreme ultraviolet

2013 ◽  
Vol 21 (23) ◽  
pp. 27537 ◽  
Author(s):  
J. I. Larruquert ◽  
L. V. Rodríguez-de Marcos ◽  
J. A. Méndez ◽  
P. J. Martin ◽  
A. Bendavid
Keyword(s):  
Extreme Ultraviolet ◽  
High Reflectance

Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection

2018 ◽  
Vol 189 (03) ◽  
pp. 323-334 ◽  
Author(s):  
D.B. Abramenko ◽  
P.S. Antsiferov ◽  
D.I. Astakhov ◽  
Aleksandr Yu. Vinokhodov ◽  
Il'ya Yu. Vichev ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Extreme Ultraviolet ◽  
Mask Inspection ◽  
Extreme Ultraviolet Radiation
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