Sub-quarter-wave multilayer coatings with high reflectance in the extreme ultraviolet

2002 ◽  
Vol 41 (25) ◽  
pp. 5398 ◽  
Author(s):  
Juan I. Larruquert ◽  
Ritva A. M. Keski-Kuha
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coatings ◽  
Quarter Wave ◽  
High Reflectance

High-reflectance coatings and materials for the extreme ultraviolet

1995 ◽  
Author(s):  
Ritva A. M. Keski-Kuha ◽  
John F. Osantowski ◽  
Gerry M. Blumenstock ◽  
Jeffrey S. Gum ◽  
Charles M. Fleetwood ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
High Reflectance

scholarly journals Wavelength selection for multilayer coatings for lithography generation beyond extreme ultraviolet

2012 ◽  
Vol 11 (4) ◽  
pp. 040501 ◽  
Author(s):  
Igor A. Makhotkin ◽  
Erwin Zoethout ◽  
Eric Louis ◽  
Andrei M. Yakunin ◽  
Stephan Müllender ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coatings ◽  
Wavelength Selection ◽  
Selection For

Multilayer coatings for optics in the extreme ultraviolet

2010 ◽  
Author(s):  
Juan I. Larruquert ◽  
Manuela Vidal-Dasilva ◽  
Sergio García-Cortés ◽  
Luis Rodríguez-de Marcos ◽  
Mónica Fernández-Perea ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Multilayer Coatings

Sub-diffraction-limited multilayer coatings for the 03 numerical aperture micro-exposure tool for extreme ultraviolet lithography

2007 ◽  
Vol 46 (18) ◽  
pp. 3736 ◽  
Author(s):  
Regina Soufli ◽  
Russell M. Hudyma ◽  
Eberhard Spiller ◽  
Eric M. Gullikson ◽  
Mark A. Schmidt ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Numerical Aperture ◽  
Multilayer Coatings ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography
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