Impact of chemical bonding difference of ALD Mo on SiO2 and Al2O3 on the effective work function of the two gate stacks

2021 ◽  
Vol 39 (4) ◽  
pp. 043201
Author(s):  
Ekaterina Zoubenko ◽  
Sara Iacopetti ◽  
Kamira Weinfeld ◽  
Yaron Kauffmann ◽  
Patrick Van Cleemput ◽  
...  
Keyword(s):  
Work Function ◽  
Chemical Bonding ◽  
Gate Stacks ◽  
Effective Work ◽  
Effective Work Function

The effects of process condition of top-TiN and TaN thickness on the effective work function of MOSCAP with high-k/metal gate stacks

2014 ◽  
Vol 35 (10) ◽  
pp. 106002 ◽  
Author(s):  
Xueli Ma ◽  
Hong Yang ◽  
Wenwu Wang ◽  
Huaxiang Yin ◽  
Huilong Zhu ◽  
...  
Keyword(s):  
Work Function ◽  
Process Condition ◽  
Gate Stacks ◽  
Metal Gate ◽  
Effective Work ◽  
Effective Work Function ◽  
High K

Ab initio study of Al–Ni bilayers on SiO2: Implications to effective work function modulation in gate stacks

2009 ◽  
Vol 105 (1) ◽  
pp. 013711 ◽  
Author(s):  
Blanka Magyari-Köpe ◽  
Seongjun Park ◽  
Luigi Colombo ◽  
Yoshio Nishi ◽  
Kyeongjae Cho
Keyword(s):  
Ab Initio ◽  
Work Function ◽  
Ab Initio Study ◽  
Gate Stacks ◽  
Effective Work ◽  
Effective Work Function

Plasma-assisted As implants for effective work function modulation of TiN/HfO2 gate stacks on germanium

2018 ◽  
Vol 112 (20) ◽  
pp. 203503 ◽  
Author(s):  
Shraddha Kothari ◽  
Dhirendra Vaidya ◽  
Hasan Nejad ◽  
Naushad Variam ◽  
Swaroop Ganguly ◽  
...  
Keyword(s):  
Work Function ◽  
Gate Stacks ◽  
Effective Work ◽  
Effective Work Function

Nitrogen Induced Extrinsic States (NIES) in Effective Work Function Instability of TiNx/SiO2 and TiNx/HfO2 Gate Stacks

2006 ◽  
Author(s):  
Chao-Sung Lai ◽  
Jer-Chyi Wang ◽  
Shih-Cheng Yang ◽  
Jian-Yi Wong ◽  
Shing-Kan Peng
Keyword(s):  
Work Function ◽  
Gate Stacks ◽  
Effective Work ◽  
Effective Work Function

Fundamental Aspects of Effective Work Function Instability of Metal/Hf-based High-k Gate Stacks

2019 ◽  
Vol 16 (5) ◽  
pp. 27-38
Author(s):  
Heiji Watanabe ◽  
Shinichi Yoshida ◽  
Yuki Kita ◽  
Takuji Hosoi ◽  
Takayoshi Shimura ◽  
...  
Keyword(s):  
Work Function ◽  
Gate Stacks ◽  
Effective Work ◽  
Effective Work Function ◽  
High K
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