Low temperature in situ boron doped Si epitaxial growth by ultrahigh vacuum electron cyclotron resonance chemical vapor deposition

Jin-Won Park; Ki-Hyun Hwang; Euijoon Yoon

doi:10.1116/1.590542

Low temperature in situ boron doped Si epitaxial growth by ultrahigh vacuum electron cyclotron resonance chemical vapor deposition

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.590542 ◽

1999 ◽

Vol 17 (1) ◽

pp. 213 ◽

Cited By ~ 2

Author(s):

Jin-Won Park ◽

Ki-Hyun Hwang ◽

Euijoon Yoon

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Epitaxial Growth ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ultrahigh Vacuum ◽

Chemical Vapor ◽

Boron Doped

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Low-temperature Si epitaxial growth on oxide patterned wafers by ultrahigh vacuum electron cyclotron resonance chemical vapor deposition

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.1358882 ◽

2001 ◽

Vol 19 (2) ◽

pp. 323

Author(s):

Hwan-Kuk Yuh ◽

Jin-Won Park ◽

Seung-Hyun Lim ◽

Ki-Hyun Hwang ◽

Euijoon Yoon

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Epitaxial Growth ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ultrahigh Vacuum ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Patterned Wafers

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Low temperature epitaxial growth of Ge using electron‐cyclotron‐resonance plasma‐assisted chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.351189 ◽

1992 ◽

Vol 71 (4) ◽

pp. 1949-1954 ◽

Cited By ~ 3

Author(s):

W. J. Varhue ◽

J. M. Carulli ◽

G. G. Peterson ◽

J. A. Miller

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Epitaxial Growth ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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Low‐Temperature Si Epitaxial Growth by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition

Journal of The Electrochemical Society ◽

10.1149/1.2069532 ◽

1992 ◽

Vol 139 (7) ◽

pp. 1983-1988 ◽

Cited By ~ 3

Author(s):

Naoki Kasai ◽

Nobuhiro Endo

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Epitaxial Growth ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Resonance Plasma

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Epitaxial growth of silicon at low temperature by ultrahigh vacuum electron cyclotron resonance plasma chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.342429 ◽

1988 ◽

Vol 64 (10) ◽

pp. 5183-5188 ◽

Cited By ~ 31

Author(s):

I. Nagai ◽

T. Takahagi ◽

A. Ishitani ◽

H. Kuroda ◽

M. Yoshikawa

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Epitaxial Growth ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition ◽

Resonance Plasma

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In situ boron doping of Si and Si1−xGex epitaxial layers by ultrahigh vacuum electron cyclotron resonance chemical vapor deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580136 ◽

1996 ◽

Vol 14 (3) ◽

pp. 1072-1075 ◽

Cited By ~ 2

Author(s):

Jin‐Won Park ◽

Ki‐Hyun Hwang ◽

Sung‐Jae Joo ◽

Euijoon Yoon ◽

Seok‐Hee Hwang ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ultrahigh Vacuum ◽

Chemical Vapor ◽

Boron Doping ◽

Electron Cyclotron ◽

Epitaxial Layers

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Low temperature growth of highly conductive boron-doped germanium thin films by electron cyclotron resonance chemical vapor deposition

Thin Solid Films ◽

10.1016/j.tsf.2013.11.099 ◽

2014 ◽

Vol 551 ◽

pp. 53-56 ◽

Cited By ~ 5

Author(s):

Teng-Hsiang Chang ◽

Chiao Chang ◽

Yen-Ho Chu ◽

Chien-Chieh Lee ◽

Jenq-Yang Chang ◽

...

Keyword(s):

Thin Films ◽

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Temperature Growth ◽

Boron Doped

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Effects of process parameters on low‐temperature silicon homoepitaxy by ultrahigh‐vacuum electron‐cyclotron‐resonance chemical‐vapor deposition

Journal of Applied Physics ◽

10.1063/1.359870 ◽

1995 ◽

Vol 78 (6) ◽

pp. 4112-4117 ◽

Cited By ~ 13

Author(s):

Heung‐Sik Tae ◽

Seok‐Hee Hwang ◽

Sang‐June Park ◽

Euijoon Yoon ◽

Ki‐Woong Whang

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Process Parameters ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ultrahigh Vacuum ◽

Chemical Vapor ◽

Electron Cyclotron

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Etching Effect of Hydrogen Plasma on Electron Cyclotron Resonance-Chemical Vapor Deposition and Its Application to Low Temperature Si Selective Epitaxial Growth

Japanese Journal of Applied Physics ◽

10.1143/jjap.37.402 ◽

1998 ◽

Vol 37 (Part 1, No. 2) ◽

pp. 402-407 ◽

Cited By ~ 21

Author(s):

Kimihiro Sasaki ◽

Toshiaki Takada

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Epitaxial Growth ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Hydrogen Plasma ◽

Chemical Vapor ◽

Selective Epitaxial Growth ◽

Etching Effect

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Electron cyclotron resonance assisted low temperature ultrahigh vacuum chemical vapor deposition of Si using silane

Applied Physics Letters ◽

10.1063/1.106178 ◽

1991 ◽

Vol 59 (15) ◽

pp. 1887-1889 ◽

Cited By ~ 44

Author(s):

D. S. L. Mui ◽

S. F. Fang ◽

H. Morkoç

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Ultrahigh Vacuum ◽

Chemical Vapor ◽

Electron Cyclotron

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Low-temperature epitaxial growth of AlN films on sapphire by electron cyclotron resonance plasma-assisted chemical vapor deposition

Journal of Crystal Growth ◽

10.1016/0022-0248(93)90867-v ◽

1993 ◽

Vol 130 (1-2) ◽

pp. 308-312 ◽

Cited By ~ 23

Author(s):

Wei Zhang ◽

Yoshihiro Someno ◽

Makoto Sasaki ◽

Toshio Hirai

Keyword(s):

Chemical Vapor Deposition ◽

Low Temperature ◽

Epitaxial Growth ◽

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

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