Generating ∼90 nanometer features using near-field contact-mode photolithography with an elastomeric phase mask

1998 ◽  
Vol 16 (1) ◽  
pp. 59 ◽  
Author(s):  
John A. Rogers
Keyword(s):  
Near Field ◽  
Phase Mask ◽  
Contact Mode

Electron beam lithography of phase mask gratings for near field holographic production of optical fibre gratings

1997 ◽  
Vol 35 (1-4) ◽  
pp. 345-348 ◽  
Author(s):  
X. Liu ◽  
J.S. Aitchison ◽  
R.M. De La Rue ◽  
S. Thoms ◽  
L. Zhang ◽  
...  
Keyword(s):  
Electron Beam ◽  
Optical Fibre ◽  
Electron Beam Lithography ◽  
Near Field ◽  
Phase Mask

Characterization of Uniformity and Reproducibility of Photoresist Nanomasks Fabricated by Near-Field Scanning Optical Nanolithography

2006 ◽  
Vol 6 (11) ◽  
pp. 3647-3651 ◽  
Author(s):  
Sangjin Kwon ◽  
Youngmo Jeong ◽  
Sungho Jeong
Keyword(s):  
Silicon Substrate ◽  
Near Field ◽  
Pattern Transfer ◽  
Contact Mode ◽  
Positive Photoresist ◽  
Atomic Force ◽  
Optical Nanolithography ◽  
Nanochannel Array ◽  
Near Field Scanning

The uniformity and reproducibility of the photoresist nanopatterns fabricated using near-field scanning optical nanolithography (NSOL) are investigated. The nanopatterns could be used as nanomasks for pattern transfer on a silicon wafer. In the NSOL process, uniform patterning with high reproducibility is essential for reliable transfer of the mask patterns on a silicon substrate. Using an aperture type cantilever nanoprobe operated at contact mode and a positive photoresist, various nanopatterns are produced on thin photoresist layer coated on the silicon substrate. The size and shape variations of thereby produced patterns are investigated using atomic force microscope to determine their uniformity and reproducibility. It is demonstrated that the NSOL-produced photoresist nanomasks can be successfully applied for silicon pattern transfer by fabricating a silicon nanochannel array.

Using an elastomeric phase mask for sub-100 nm photolithography in the optical near field

1997 ◽  
Vol 70 (20) ◽  
pp. 2658-2660 ◽  
Author(s):  
John A. Rogers ◽  
Kateri E. Paul ◽  
Rebecca J. Jackman ◽  
George M. Whitesides
Keyword(s):  
Near Field ◽  
Phase Mask

Contact mode near-field microscope

1999 ◽  
Vol 76 (1-2) ◽  
pp. 13-20 ◽  
Author(s):  
D.A. Lapshin ◽  
V.N. Reshetov ◽  
S.K. Sekatskii ◽  
V.S. Letokhov
Keyword(s):  
Near Field ◽  
Contact Mode

Near‐infrared contact mode collection near‐field optical and normal force microscopy of modulated multiple quantum well lasers

1996 ◽  
Vol 68 (17) ◽  
pp. 2337-2339 ◽  
Author(s):  
U. Ben‐Ami ◽  
N. Tessler ◽  
N. Ben‐Ami ◽  
R. Nagar ◽  
G. Fish ◽  
...  
Keyword(s):  
Quantum Well ◽  
Near Infrared ◽  
Normal Force ◽  
Near Field ◽  
Multiple Quantum Well ◽  
Quantum Well Lasers ◽  
Multiple Quantum ◽  
Contact Mode ◽  
Force Microscopy

Non-contact Local Conductivity Measurement of Metallic Nanowires Based on Semi-near-field Reflection of Microwave Atomic Force Microscopy

2021 ◽  
Author(s):  
Bo Tong ◽  
Takahiro Hirabayashi ◽  
Yuhki Toku ◽  
Yasuyuki Morita ◽  
Yang Ju
Keyword(s):  
Atomic Force Microscopy ◽  
Evaluation Method ◽  
Near Field ◽  
Conductivity Measurement ◽  
Nanometer Scale ◽  
Metallic Nanowires ◽  
Contact Mode ◽  
Cu Nanowires ◽  
Force Microscopy ◽  
Atomic Force

Abstract In this study, a non-contact and quantitative evaluation method was developed to measure the conductivity of metallic nanowires with a nanometer-scale spatial resolution. A coaxial probe was experimentally fabricated; using this probe, microwave images of the Al, Ag, and Cu nanowires and their topography images were simultaneously obtained via microwave atomic force microscopy (M-AFM) in the non-contact mode. A semi-near-field reflection model was established to describe the spatial distribution of a microwave between the tip of the probe and the sample. The local conductivities of metallic nanowires on the nanometer-scale can be quantitatively evaluated in a single scan, using a metal strip substrate to calibrate the reflection signal.

Sign in / Sign up

Export Citation Format

Share Document