Substrate temperature measurement by absorption-edge spectroscopy during molecular beam epitaxy of narrow-band gap semiconductor films

Author(s):  
T. J. de Lyon
2002 ◽  
Vol 743 ◽  
Author(s):  
R. Goldhahn ◽  
S. Shokhovets ◽  
V. Cimalla ◽  
L. Spiess ◽  
G. Ecke ◽  
...  

ABSTRACTSpectroscopic ellipsometry studies in the energy range from 0.7 up to 5.5 eV were carried out in order to determine the dielectric function (DF) of ‘narrow’ band gap (< 1 eV) single-crystalline InN films grown by molecular beam epitaxy on sapphire substrates. The imaginary part of the DF is characterized by a strong increase immediately above the band gap and then by a nearly constant value up to 4 eV. Pronounced structures above 4 eV are attributed to transitions along the L-M direction in the Brillouin-zone as a comparison with first-principles calculations indicates. In contrast, sputtered layers (band gap ∼1.9 eV) studied for comparison show a completely different spectral shape of the DF. Finally, DF's of high In-content InGaN alloys are presented, providing further evidence that InN is a “narrow” band gap semiconductor.


1991 ◽  
Vol 69 (3-4) ◽  
pp. 422-426 ◽  
Author(s):  
M. K. Weilmeier ◽  
K. M. Colbow ◽  
T. Tiedje ◽  
T. Van Buuren ◽  
Li Xu

A new optical temperature measurement technique for use in molecular beam epitaxy is demonstrated with GaAs substrates. The temperature of the semiconductor is inferred from its band gap, which is measured by the diffuse reflectivity of the substrate that is textured on the back surface. The method has a sensitivity of better than 2 °C, and an absolute accuracy limited by the accuracy with which the band gap is known as a function of temperature. It was found to be necessary to calibrate the measurement technique with a thermocouple in contact with the sample in order to achieve satisfactory accuracy at high temperatures. Measurements of the optical absorption edge of GaAs, show that the slope of the Urbach edge is independent of temperature from room temperature to 450 °C.


1988 ◽  
Vol 49 (C4) ◽  
pp. C4-607-C4-614
Author(s):  
R. J. MALIK ◽  
A. F.J. LEVI ◽  
B. F. LEVINE ◽  
R. C. MILLER ◽  
D. V. LANG ◽  
...  

1991 ◽  
Vol 241 ◽  
Author(s):  
Bijan Tadayon ◽  
Mohammad Fatemi ◽  
Saied Tadayon ◽  
F. Moore ◽  
Harry Dietrich

ABSTRACTWe present here the results of a study on the effect of substrate temperature, Ts, on the electrical and physical characteristics of low temperature (LT) molecular beam epitaxy GaAs layers. Hall measurements have been performed on the asgrown samples and on samples annealed at 610 °C and 850 °C. Si implantation into these layers has also been investigated.


2004 ◽  
Vol 1 (4) ◽  
pp. 706-709
Author(s):  
M. Muñoz ◽  
O. Maksimov ◽  
M. C. Tamargo ◽  
M. R. Buckley ◽  
F. C. Peiris

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