Two-dimensional dopant profiling of very large scale integrated devices using selective etching and atomic force microscopy
1996 ◽
Vol 14
(1)
◽
pp. 447
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Keyword(s):
1999 ◽
Vol 17
(4)
◽
pp. 1354
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1999 ◽
Vol 2
(9)
◽
pp. 475
◽
1999 ◽
Vol 146
(2)
◽
pp. 749-754
◽
Keyword(s):
Keyword(s):
1996 ◽
Vol 35
(Part 1, No. 12A)
◽
pp. 6233-6238
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1995 ◽
Vol 13
(3)
◽
pp. 1699-1704
◽