Two-Dimensional Dopant Profiling of an Integrated Circuit Using Bias-Applied Phase-Imaging Tapping Mode Atomic Force Microscopy

1999 ◽  
Vol 2 (9) ◽  
pp. 475 ◽  
Author(s):  
M. W. Nelson
Keyword(s):  
Atomic Force Microscopy ◽  
Integrated Circuit ◽  
Phase Imaging ◽  
Two Dimensional ◽  
Tapping Mode ◽  
Dopant Profiling ◽  
Force Microscopy ◽  
Atomic Force ◽  
Mode Atomic Force Microscopy

Spatially resolved dopant profiling of patterned Si wafers by bias-applied phase-imaging tapping-mode atomic force microscopy

1999 ◽  
Vol 74 (10) ◽  
pp. 1421-1423 ◽  
Author(s):  
M. W. Nelson ◽  
P. G. Schroeder ◽  
R. Schlaf ◽  
B. A. Parkinson ◽  
C. W. Almgren ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Phase Imaging ◽  
Tapping Mode ◽  
Dopant Profiling ◽  
Force Microscopy ◽  
Spatially Resolved ◽  
Atomic Force ◽  
Mode Atomic Force Microscopy

scholarly journals From Images to Interactions: High-Resolution Phase Imaging in Tapping-Mode Atomic Force Microscopy

2001 ◽  
Vol 80 (6) ◽  
pp. 3009-3018 ◽  
Author(s):  
Martin Stark ◽  
Clemens Möller ◽  
Daniel J. Müller ◽  
Reinhard Guckenberger
Keyword(s):  
Atomic Force Microscopy ◽  
High Resolution ◽  
Phase Imaging ◽  
Tapping Mode ◽  
Force Microscopy ◽  
Atomic Force ◽  
Mode Atomic Force Microscopy

Tapping-mode atomic force microscopy and phase-imaging in higher eigenmodes

1999 ◽  
Vol 74 (22) ◽  
pp. 3296-3298 ◽  
Author(s):  
Robert W. Stark ◽  
Tanja Drobek ◽  
Wolfgang M. Heckl
Keyword(s):  
Atomic Force Microscopy ◽  
Phase Imaging ◽  
Tapping Mode ◽  
Force Microscopy ◽  
Atomic Force ◽  
Mode Atomic Force Microscopy
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