Lateral and vertical dopant profiling in semiconductors by atomic force microscopy using conducting tips

1995 ◽  
Vol 13 (3) ◽  
pp. 1699-1704 ◽  
Author(s):  
P. De Wolf ◽  
J. Snauwaert ◽  
L. Hellemans ◽  
T. Clarysse ◽  
W. Vandervorst ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Dopant Profiling ◽  
Force Microscopy ◽  
Atomic Force

Spatially resolved dopant profiling of patterned Si wafers by bias-applied phase-imaging tapping-mode atomic force microscopy

1999 ◽  
Vol 74 (10) ◽  
pp. 1421-1423 ◽  
Author(s):  
M. W. Nelson ◽  
P. G. Schroeder ◽  
R. Schlaf ◽  
B. A. Parkinson ◽  
C. W. Almgren ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Phase Imaging ◽  
Tapping Mode ◽  
Dopant Profiling ◽  
Force Microscopy ◽  
Spatially Resolved ◽  
Atomic Force ◽  
Mode Atomic Force Microscopy
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