2-D dopant profiling in VLSI devices using dopant-selective etching: an atomic force microscopy study

M. Barrett; M. Dennis; D. Tiffin; Y. Li; C.K. Shih

doi:10.1109/55.363243

2-D dopant profiling in VLSI devices using dopant-selective etching: an atomic force microscopy study

IEEE Electron Device Letters ◽

10.1109/55.363243 ◽

1995 ◽

Vol 16 (3) ◽

pp. 118-120 ◽

Cited By ~ 18

Author(s):

M. Barrett ◽

M. Dennis ◽

D. Tiffin ◽

Y. Li ◽

C.K. Shih

Keyword(s):

Atomic Force Microscopy ◽

Microscopy Study ◽

Selective Etching ◽

Atomic Force Microscopy Study ◽

Dopant Profiling ◽

Force Microscopy ◽

Atomic Force

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Atomic Force Microscopy Study of the Polymeric Nanotemplate Fabricated via a Microphase Separation and Subsequent Selective Etching of (PS-b-PI) Copolymer Thin Film

Japanese Journal of Applied Physics ◽

10.1143/jjap.43.762 ◽

2004 ◽

Vol 43 (2) ◽

pp. 762-766

Author(s):

Jonghyurk Park ◽

Jeong Sook Ha ◽

Jinsook Ryu ◽

Taihyun Chang

Keyword(s):

Thin Film ◽

Atomic Force Microscopy ◽

Microphase Separation ◽

Microscopy Study ◽

Selective Etching ◽

Atomic Force Microscopy Study ◽

Force Microscopy ◽

Atomic Force

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Nano-structural signs of the cortical bone fragility: atomic force microscopy study in the femoral neck of elderly hip fracture patients and healthy aged controls

Bone Abstracts ◽

10.1530/boneabs.1.pp48 ◽

2013 ◽

Author(s):

Petar Milovanovic ◽

Zlatko Rakocevic ◽

Jelena Potocnik ◽

Danijela Djonic ◽

Vladimir Zivkovic ◽

...

Keyword(s):

Atomic Force Microscopy ◽

Hip Fracture ◽

Femoral Neck ◽

Cortical Bone ◽

Microscopy Study ◽

Bone Fragility ◽

Atomic Force Microscopy Study ◽

Force Microscopy ◽

Atomic Force

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Atomic Force Microscopy study on the effect of different lecithins in cocoa-butter based suspensions

Colloids and Surfaces A Physicochemical and Engineering Aspects ◽

10.1016/j.colsurfa.2016.03.057 ◽

2016 ◽

Vol 499 ◽

pp. 60-68 ◽

Cited By ~ 8

Author(s):

D. Middendorf ◽

U. Bindrich ◽

P. Mischnick ◽

A. Juadjur ◽

K. Franke ◽

...

Keyword(s):

Atomic Force Microscopy ◽

Cocoa Butter ◽

Microscopy Study ◽

Atomic Force Microscopy Study ◽

Force Microscopy ◽

Atomic Force

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Operando atomic force microscopy study of electric double-layer transistors based on ionic liquid/rubrene single crystal interfaces

Applied Physics Letters ◽

10.1063/5.0053848 ◽

2021 ◽

Vol 118 (24) ◽

pp. 243301

Author(s):

Yusuke Morino ◽

Yasuyuki Yokota ◽

Ken-ichi Bando ◽

Hisaya Hara ◽

Akihito Imanishi ◽

...

Keyword(s):

Atomic Force Microscopy ◽

Ionic Liquid ◽

Single Crystal ◽

Double Layer ◽

Electric Double Layer ◽

Microscopy Study ◽

Atomic Force Microscopy Study ◽

Force Microscopy ◽

Atomic Force ◽

Crystal Interfaces

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Adsorption of Polyethylenimine on Graphite: An Atomic Force Microscopy Study

Macromolecules ◽

10.1021/ma0345293 ◽

2003 ◽

Vol 36 (25) ◽

pp. 9510-9518 ◽

Cited By ~ 23

Author(s):

Marc Schneider ◽

Martin Brinkmann ◽

Helmuth Möhwald

Keyword(s):

Atomic Force Microscopy ◽

Microscopy Study ◽

Atomic Force Microscopy Study ◽

Force Microscopy ◽

Atomic Force

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An atomic force microscopy study of thin copper oxide films grown by molecular beam epitaxy on MgO(100)

Thin Solid Films ◽

10.1016/0040-6090(96)08574-4 ◽

1996 ◽

Vol 281-282 ◽

pp. 57-59 ◽

Cited By ~ 6

Author(s):

A. Brazdeikis ◽

U.O. Karlsson ◽

A.S. Flodström

Keyword(s):

Atomic Force Microscopy ◽

Molecular Beam Epitaxy ◽

Copper Oxide ◽

Molecular Beam ◽

Oxide Films ◽

Microscopy Study ◽

Atomic Force Microscopy Study ◽

Force Microscopy ◽

Atomic Force

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Importance of the indentation depth in tapping-mode atomic force microscopy study of compliant materials

Applied Physics Letters ◽

10.1063/1.125581 ◽

1999 ◽

Vol 75 (26) ◽

pp. 4198-4200 ◽

Cited By ~ 39

Author(s):

G. Bar ◽

L. Delineau ◽

R. Brandsch ◽

M. Bruch ◽

M.-H. Whangbo

Keyword(s):

Atomic Force Microscopy ◽

Indentation Depth ◽

Microscopy Study ◽

Atomic Force Microscopy Study ◽

Tapping Mode ◽

Force Microscopy ◽

Atomic Force ◽

Mode Atomic Force Microscopy

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Self-lubricant behaviour of copper-carbon nanocomposites: An electron microscopy and atomic force microscopy study

Microscopy and Microanalysis ◽

10.1017/s1431927614014275 ◽

2015 ◽

Vol 21 (S6) ◽

pp. 114-115

Author(s):

D. Silva ◽

J. Jeremias ◽

D. Nunes ◽

J.B. Correia ◽

K. Hanada ◽

...

Keyword(s):

Electron Microscopy ◽

Atomic Force Microscopy ◽

Microscopy Study ◽

Atomic Force Microscopy Study ◽

Carbon Nanocomposites ◽

Force Microscopy ◽

Atomic Force

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An Atomic Force Microscopy Study on the Roughness of Silicon Wafers Correlated with Direct Wafer Bonding

Journal of The Electrochemical Society ◽

10.1149/1.1837009 ◽

1996 ◽

Vol 143 (7) ◽

pp. 2365-2371 ◽

Cited By ~ 13

Author(s):

Brian E. Roberds ◽

Shari N. Farrens

Keyword(s):

Atomic Force Microscopy ◽

Wafer Bonding ◽

Microscopy Study ◽

Silicon Wafers ◽

Atomic Force Microscopy Study ◽

Force Microscopy ◽

Atomic Force ◽

Direct Wafer Bonding

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The effects of fluoride on the nanostructure and surface pK of enamel crystals: an atomic force microscopy study of human and rat enamel

European Journal Of Oral Sciences ◽

10.1111/j.1600-0722.2006.00275.x ◽

2006 ◽

Vol 114 (s1) ◽

pp. 99-104 ◽

Cited By ~ 11

Author(s):

Colin Robinson ◽

Kyoko Yamamoto ◽

Simon D. Connell ◽

Jennifer Kirkham ◽

Haruo Nakagaki ◽

...

Keyword(s):

Atomic Force Microscopy ◽

Microscopy Study ◽

Atomic Force Microscopy Study ◽

Force Microscopy ◽

Atomic Force

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