Three-dimensional analysis of a microstructure by submicron secondary ion mass spectrometry

H. Satoh

doi:10.1116/1.585662

Three-dimensional analysis of a microstructure by submicron secondary ion mass spectrometry

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.585662 ◽

1991 ◽

Vol 9 (5) ◽

pp. 2638 ◽

Cited By ~ 5

Author(s):

H. Satoh

Keyword(s):

Mass Spectrometry ◽

Dimensional Analysis ◽

Secondary Ion Mass Spectrometry ◽

Three Dimensional ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Three dimensional analysis of self-structuring organic thin films using time-of-flight secondary ion mass spectrometry

Thin Solid Films ◽

10.1016/j.tsf.2011.04.018 ◽

2011 ◽

Vol 519 (18) ◽

pp. 6183-6189 ◽

Cited By ~ 4

Author(s):

Karl E. Mayerhofer ◽

Jakob Heier ◽

Ylenia Maniglio ◽

Beat Andreas Keller

Keyword(s):

Mass Spectrometry ◽

Thin Films ◽

Dimensional Analysis ◽

Secondary Ion Mass Spectrometry ◽

Three Dimensional ◽

Time Of Flight ◽

Organic Thin Films ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Robust automated three-dimensional segmentation of secondary ion mass spectrometry image sets

Fresenius Journal of Analytical Chemistry ◽

10.1007/s002160051446 ◽

1999 ◽

Vol 365 (1-3) ◽

pp. 63-69 ◽

Cited By ~ 2

Author(s):

M. Wolkenstein ◽

T. Stubbings ◽

H. Hutter

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Three Dimensional ◽

Mass Spectrometry Image ◽

Ion Mass Spectrometry ◽

Three Dimensional Segmentation ◽

Secondary Ion

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Three-Dimensional Image of Cleavage Bodies in Nuclei Is Configured Using Gas Cluster Ion Beam with Time-of-Flight Secondary Ion Mass Spectrometry

Scientific Reports ◽

10.1038/srep10000 ◽

2015 ◽

Vol 5 (1) ◽

Cited By ~ 4

Author(s):

Noritaka Masaki ◽

Itsuko Ishizaki ◽

Takahiro Hayasaka ◽

Gregory L. Fisher ◽

Noriaki Sanada ◽

...

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Ion Beam ◽

Three Dimensional ◽

Time Of Flight ◽

Dimensional Image ◽

Ion Mass Spectrometry ◽

Cluster Ion ◽

Gas Cluster Ion Beam ◽

Secondary Ion

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Approach for a three-dimensional on-chip quantification by secondary-ion mass spectrometry analysis

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580872 ◽

1997 ◽

Vol 15 (3) ◽

pp. 445-451 ◽

Cited By ~ 5

Author(s):

Hubert Gnaser

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Three Dimensional ◽

Mass Spectrometry Analysis ◽

Spectrometry Analysis ◽

Ion Mass Spectrometry ◽

On Chip ◽

Secondary Ion

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Three-Dimensional Time-of-Flight Secondary Ion Mass Spectrometry Imaging of a Pharmaceutical in a Coronary Stent Coating as a Function of Elution Time

Analytical Chemistry ◽

10.1021/ac901587k ◽

2009 ◽

Vol 81 (24) ◽

pp. 9930-9940 ◽

Cited By ~ 48

Author(s):

Gregory L. Fisher ◽

Anna M. Belu ◽

Christine M. Mahoney ◽

Klaus Wormuth ◽

Noriaki Sanada

Keyword(s):

Mass Spectrometry ◽

Mass Spectrometry Imaging ◽

Secondary Ion Mass Spectrometry ◽

Three Dimensional ◽

Time Of Flight ◽

Coronary Stent ◽

Elution Time ◽

Ion Mass Spectrometry ◽

Stent Coating ◽

Secondary Ion

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Three-Dimensional Information on the Phase Domain Structure of Thin Films of Polymer Blends Revealed by Secondary Ion Mass Spectrometry

Macromolecular Rapid Communications ◽

10.1002/1521-3927(20010701)22:11<829::aid-marc829>3.0.co;2-8 ◽

2001 ◽

Vol 22 (11) ◽

pp. 829-834 ◽

Cited By ~ 25

Author(s):

Andrzej Bernasik ◽

Jakub Rysz ◽

Andrzej Budkowski ◽

Kazimierz Kowalski ◽

Józef Camra ◽

...

Keyword(s):

Mass Spectrometry ◽

Thin Films ◽

Polymer Blends ◽

Domain Structure ◽

Secondary Ion Mass Spectrometry ◽

Three Dimensional ◽

Phase Domain ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Design and performance of a combined secondary ion mass spectrometry-scanning probe microscopy instrument for high sensitivity and high-resolution elemental three-dimensional analysis

Review of Scientific Instruments ◽

10.1063/1.4724308 ◽

2012 ◽

Vol 83 (6) ◽

pp. 063702 ◽

Cited By ~ 20

Author(s):

Tom Wirtz ◽

Yves Fleming ◽

Mathieu Gerard ◽

Urs Gysin ◽

Thilo Glatzel ◽

...

Keyword(s):

Mass Spectrometry ◽

High Resolution ◽

Dimensional Analysis ◽

Scanning Probe Microscopy ◽

Secondary Ion Mass Spectrometry ◽

Three Dimensional ◽

High Sensitivity ◽

Scanning Probe ◽

And Performance ◽

Secondary Ion

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Two-dimensional and three-dimensional dynamic imaging of live biofilms in a microchannel by time-of-flight secondary ion mass spectrometry

Biomicrofluidics ◽

10.1063/1.4919807 ◽

2015 ◽

Vol 9 (3) ◽

pp. 031101 ◽

Cited By ~ 23

Author(s):

Xin Hua ◽

Matthew J. Marshall ◽

Yijia Xiong ◽

Xiang Ma ◽

Yufan Zhou ◽

...

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Three Dimensional ◽

Time Of Flight ◽

Dynamic Imaging ◽

Two Dimensional ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Time of flight secondary ion mass spectrometry—A method to evaluate plasma-modified three-dimensional scaffold chemistry

Biointerphases ◽

10.1116/1.5023005 ◽

2018 ◽

Vol 13 (3) ◽

pp. 03B415 ◽

Cited By ~ 3

Author(s):

Michael J. Taylor ◽

Hannah Aitchison ◽

Morgan J. Hawker ◽

Michelle N. Mann ◽

Ellen R. Fisher ◽

...

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Three Dimensional ◽

Time Of Flight ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Time‐of‐flight secondary ion mass spectrometry three‐dimensional imaging of surface modifications in poly(caprolactone) scaffold pores

Journal of Biomedical Materials Research Part A ◽

10.1002/jbm.a.36729 ◽

2019 ◽

Vol 107 (10) ◽

pp. 2195-2204 ◽

Cited By ~ 1

Author(s):

Michael J. Taylor ◽

Daniel J. Graham ◽

Lara J. Gamble

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Three Dimensional ◽

Time Of Flight ◽

Surface Modifications ◽

Three Dimensional Imaging ◽

Ion Mass Spectrometry ◽

Poly Caprolactone ◽

Secondary Ion

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