Design and performance of a combined secondary ion mass spectrometry-scanning probe microscopy instrument for high sensitivity and high-resolution elemental three-dimensional analysis

Tom Wirtz; Yves Fleming; Mathieu Gerard; Urs Gysin; Thilo Glatzel; Ernst Meyer; Urs Wegmann; Urs Maier; Aitziber Herrero Odriozola; Daniel Uehli

doi:10.1063/1.4724308

Design and performance of a combined secondary ion mass spectrometry-scanning probe microscopy instrument for high sensitivity and high-resolution elemental three-dimensional analysis

Review of Scientific Instruments ◽

10.1063/1.4724308 ◽

2012 ◽

Vol 83 (6) ◽

pp. 063702 ◽

Cited By ~ 20

Author(s):

Tom Wirtz ◽

Yves Fleming ◽

Mathieu Gerard ◽

Urs Gysin ◽

Thilo Glatzel ◽

...

Keyword(s):

Mass Spectrometry ◽

High Resolution ◽

Dimensional Analysis ◽

Scanning Probe Microscopy ◽

Secondary Ion Mass Spectrometry ◽

Three Dimensional ◽

High Sensitivity ◽

Scanning Probe ◽

And Performance ◽

Secondary Ion

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Three dimensional analysis of self-structuring organic thin films using time-of-flight secondary ion mass spectrometry

Thin Solid Films ◽

10.1016/j.tsf.2011.04.018 ◽

2011 ◽

Vol 519 (18) ◽

pp. 6183-6189 ◽

Cited By ~ 4

Author(s):

Karl E. Mayerhofer ◽

Jakob Heier ◽

Ylenia Maniglio ◽

Beat Andreas Keller

Keyword(s):

Mass Spectrometry ◽

Thin Films ◽

Dimensional Analysis ◽

Secondary Ion Mass Spectrometry ◽

Three Dimensional ◽

Time Of Flight ◽

Organic Thin Films ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Imaging subcellular features with scanning probe microscopy and secondary ion mass spectrometry in nanomedicine research

Nanomedicine Nanotechnology Biology and Medicine ◽

10.1016/j.nano.2007.10.079 ◽

2007 ◽

Vol 3 (4) ◽

pp. 354

Author(s):

H.-Y. Nie ◽

J.T. Francis ◽

A.R. Taylor ◽

M.J. Walzak ◽

W.H. Chang ◽

...

Keyword(s):

Mass Spectrometry ◽

Scanning Probe Microscopy ◽

Secondary Ion Mass Spectrometry ◽

Scanning Probe ◽

Probe Microscopy ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Imaging subcellular features of a sectioned rat brain using time-of-flight secondary ion mass spectrometry and scanning probe microscopy

Applied Surface Science ◽

10.1016/j.apsusc.2008.05.149 ◽

2008 ◽

Vol 255 (4) ◽

pp. 1079-1083 ◽

Cited By ~ 7

Author(s):

H.-Y. Nie ◽

J.T. Francis ◽

A.R. Taylor ◽

M.J. Walzak ◽

W.H. Chang ◽

...

Keyword(s):

Mass Spectrometry ◽

Rat Brain ◽

Scanning Probe Microscopy ◽

Secondary Ion Mass Spectrometry ◽

Time Of Flight ◽

Scanning Probe ◽

Probe Microscopy ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Three-dimensional analysis of a microstructure by submicron secondary ion mass spectrometry

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.585662 ◽

1991 ◽

Vol 9 (5) ◽

pp. 2638 ◽

Cited By ~ 5

Author(s):

H. Satoh

Keyword(s):

Mass Spectrometry ◽

Dimensional Analysis ◽

Secondary Ion Mass Spectrometry ◽

Three Dimensional ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Correlative Microscopy based on Secondary Ion Mass Spectrometry for High-Resolution High-Sensitivity Nano-Analytics

Microscopy and Microanalysis ◽

10.1017/s1431927615000860 ◽

2015 ◽

Vol 21 (S3) ◽

pp. 13-14

Author(s):

T. Wirtz ◽

D. Dowsett ◽

S. Eswara Moorthy

Keyword(s):

Mass Spectrometry ◽

High Resolution ◽

Secondary Ion Mass Spectrometry ◽

High Sensitivity ◽

Correlative Microscopy ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Imaging subcellular features with scanning probe microscopy and secondary ion mass spectrometry in nanomedicine research

Nanomedicine Nanotechnology Biology and Medicine ◽

10.1016/j.nano.2007.10.048 ◽

2007 ◽

Vol 3 (4) ◽

pp. 345

Author(s):

H.-Y. Nie ◽

J.T. Francis ◽

A.R. Taylor ◽

M.J. Walzak ◽

W.H. Chang ◽

...

Keyword(s):

Mass Spectrometry ◽

Scanning Probe Microscopy ◽

Secondary Ion Mass Spectrometry ◽

Scanning Probe ◽

Probe Microscopy ◽

Ion Mass Spectrometry ◽

Secondary Ion

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High-resolution high-sensitivity elemental imaging by secondary ion mass spectrometry: from traditional 2D and 3D imaging to correlative microscopy

Nanotechnology ◽

10.1088/0957-4484/26/43/434001 ◽

2015 ◽

Vol 26 (43) ◽

pp. 434001 ◽

Cited By ~ 71

Author(s):

T Wirtz ◽

P Philipp ◽

J-N Audinot ◽

D Dowsett ◽

S Eswara

Keyword(s):

Mass Spectrometry ◽

High Resolution ◽

3D Imaging ◽

Secondary Ion Mass Spectrometry ◽

High Sensitivity ◽

Correlative Microscopy ◽

Elemental Imaging ◽

Ion Mass Spectrometry ◽

2D And 3D ◽

Secondary Ion

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High resolution 3-D imaging for characteristics of (111)-oriented Pb(Zr0.35Ti0.65)O3 thin film by using time-of-flight secondary ion mass spectrometry and piezoresponse force microscopy

Electronic Materials Letters ◽

10.1007/s13391-011-0916-y ◽

2011 ◽

Vol 7 (3) ◽

pp. 265-270 ◽

Cited By ~ 5

Author(s):

Hyun-Chang Shin ◽

Joon-Tae Song

Keyword(s):

Thin Film ◽

Mass Spectrometry ◽

High Resolution ◽

Secondary Ion Mass Spectrometry ◽

Time Of Flight ◽

Piezoresponse Force Microscopy ◽

Force Microscopy ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Robust automated three-dimensional segmentation of secondary ion mass spectrometry image sets

Fresenius Journal of Analytical Chemistry ◽

10.1007/s002160051446 ◽

1999 ◽

Vol 365 (1-3) ◽

pp. 63-69 ◽

Cited By ~ 2

Author(s):

M. Wolkenstein ◽

T. Stubbings ◽

H. Hutter

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Three Dimensional ◽

Mass Spectrometry Image ◽

Ion Mass Spectrometry ◽

Three Dimensional Segmentation ◽

Secondary Ion

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Three-Dimensional Image of Cleavage Bodies in Nuclei Is Configured Using Gas Cluster Ion Beam with Time-of-Flight Secondary Ion Mass Spectrometry

Scientific Reports ◽

10.1038/srep10000 ◽

2015 ◽

Vol 5 (1) ◽

Cited By ~ 4

Author(s):

Noritaka Masaki ◽

Itsuko Ishizaki ◽

Takahiro Hayasaka ◽

Gregory L. Fisher ◽

Noriaki Sanada ◽

...

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Ion Beam ◽

Three Dimensional ◽

Time Of Flight ◽

Dimensional Image ◽

Ion Mass Spectrometry ◽

Cluster Ion ◽

Gas Cluster Ion Beam ◽

Secondary Ion

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