Distortion measurement of embedded absorber (silicon membrane) and conventional (diamond membrane) x-ray masks
1990 ◽
Vol 8
(6)
◽
pp. 1584
◽
1990 ◽
1990 ◽
Vol 29
(Part 1, No. 11)
◽
pp. 2605-2609
◽
Keyword(s):
1994 ◽
Vol 144
◽
pp. 275-277