In situ low-energy ion scattering analysis of InP surface during molecular-beam epitaxy

1990 ◽  
Vol 8 (4) ◽  
pp. 697 ◽  
Author(s):  
Minoru Kubo
Keyword(s):  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Low Energy ◽  
Ion Scattering ◽  
Low Energy Ion Scattering ◽  
Inp Surface

In situ observations of Ge(001) and Ge/Si(001) using low‐energy ion scattering

1994 ◽  
Vol 12 (6) ◽  
pp. 3012-3017 ◽  
Author(s):  
W. T. Taferner ◽  
A. Freundlich ◽  
A. Bensaoula ◽  
A. Ignatiev ◽  
Kelley Waters ◽  
...  
Keyword(s):  
Low Energy ◽  
Ion Scattering ◽  
Low Energy Ion Scattering ◽  
In Situ Observations

In-situ Subplantation of Low-Energy (~100 eV) C+ into GaAs using Combined Ion Beam and Molecular Beam Epitaxy

1994 ◽  
pp. 169-172
Author(s):  
Tsutomu Iida ◽  
Yunosuke Makita ◽  
Shinji Kimura ◽  
Stefan Winter ◽  
Akimasa Yamada ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Ion Beam ◽  
Low Energy

In-Situ Measurement ofHe+Stopping in Si Layers by Low-Energy Ion-Scattering Spectroscopy

1996 ◽  
Vol 35 (Part 1, No. 3) ◽  
pp. 1937-1939 ◽  
Author(s):  
Miyako Matsui ◽  
Fumihiko Uchida ◽  
Kiyokazu Nakagawa ◽  
Akio Nishida
Keyword(s):  
Low Energy ◽  
In Situ Measurement ◽  
Ion Scattering ◽  
Low Energy Ion Scattering ◽  
Ion Scattering Spectroscopy
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