Ultrashallow Si p+–n junction fabrication by low energy Ga+ focused ion beam implantation

1990 ◽  
Vol 8 (6) ◽  
pp. 1937 ◽  
Author(s):  
A. J. Steckl
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Low Energy ◽  
Ion Beam Implantation

Array of bright silicon-vacancy centers in diamond fabricated by low-energy focused ion beam implantation

2014 ◽  
Vol 7 (11) ◽  
pp. 115201 ◽  
Author(s):  
Syuto Tamura ◽  
Godai Koike ◽  
Akira Komatsubara ◽  
Tokuyuki Teraji ◽  
Shinobu Onoda ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Low Energy ◽  
Silicon Vacancy ◽  
Ion Beam Implantation

Doping Study on Maskless Selective Direct Growth of GaAs Using Low-Energy Focused Ion Beam

2004 ◽  
Vol 43 (No. 6A) ◽  
pp. L716-L718 ◽  
Author(s):  
Tomokazu Nishiyama ◽  
Eum-Mi Kim ◽  
Kazutoshi Numata ◽  
Kangsa Pak
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Low Energy ◽  
Direct Growth

Conductance Oscillations in Hopping Conduction Systems Fabricated by Focused Ion Beam Implantation

1997 ◽  
Vol 36 (Part 1, No. 6B) ◽  
pp. 4046-4048 ◽  
Author(s):  
Hiroki Kondo ◽  
Hirotaka Iwano ◽  
Osamu Nakatsuka ◽  
Kazutaka Kaga ◽  
Shigeaki Zaima ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Hopping Conduction ◽  
Ion Beam Implantation

Low energy focused ion beam milling of silicon and germanium nanostructures

2011 ◽  
Vol 22 (10) ◽  
pp. 105304 ◽  
Author(s):  
Miroslav Kolíbal ◽  
Tomáš Matlocha ◽  
Tomáš Vystavěl ◽  
Tomáš Šikola
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Low Energy ◽  
Silicon And Germanium ◽  
Focused Ion Beam Milling

Mutation breeding of nuclease p1 production in Penicillium citrinum by low-energy ion beam implantation

2011 ◽  
Vol 28 (2) ◽  
pp. 544-549 ◽  
Author(s):  
Qinting He ◽  
Nan Li ◽  
Xiaochun Chen ◽  
Qi Ye ◽  
Jianxin Bai ◽  
...  
Keyword(s):  
Ion Beam ◽  
Mutation Breeding ◽  
Penicillium Citrinum ◽  
Low Energy ◽  
Nuclease P1 ◽  
Ion Beam Implantation
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